Effects of annealing on electron-beam evaporated 193nm al2o3/mgf2 hr mirrors
文献类型：期刊论文
| 作者 | Shang, SZ; Shao, JD; Shen, J; Yi, K; Fan, ZX |
| 刊名 | Acta physica sinica
 |
| 出版日期 | 2006-05-01 |
| 卷号 | 55期号:5页码:2639-2643 |
| 关键词 | 193nm hr mirrors Annealing Optical loss Absorption |
| ISSN号 | 1000-3290 |
| 通讯作者 | Shang, sz(shangshuzhen@mail.siom.ac.cn) |
| 英文摘要 | 193nm al2o3/mgf2 hr mirrors were designed and deposited by electron-beam evaporation, and then annealed in air at different temperatures from 250 degrees c to 400 degrees c. the center wavelength shifted to shorter wavelength after annealing. and the reflectance of hr region increased but the transmittance changed negligibly little with the increasing of the annealing temperature. the total integrated scattering was measured to distinguish the scattering loss and the absorption loss. the results indicated that the total optical loss in the hr region was absorption dominant rather than scattering dominant. to know clearly the loss-reduction mechanism of annealing, the corresponding single-layers of al2o3 were deposited and annealed in the same way. the change of optical constants was analyzed to explain the reduction of the total optical loss. and the reflectance of the hr mirrors reached was higher than 98%. |
| WOS研究方向 | Physics |
| WOS类目 | Physics, Multidisciplinary |
| 语种 | 英语 |
| WOS记录号 | WOS:000237522000091 |
| 出版者 | CHINESE PHYSICAL SOC |
| URI标识 | http://www.irgrid.ac.cn/handle/1471x/2379350 |
| 专题 | 中国科学院大学 |
| 通讯作者 | Shang, SZ |
| 作者单位 | 1.Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, R&D Ctr Opt Thin Film Coatings, Shanghai 201800, Peoples R China 2.Chinese Acad Sci, Grad Sch, Beijing 100049, Peoples R China |
| 推荐引用方式 GB/T 7714 | Shang, SZ,Shao, JD,Shen, J,et al. Effects of annealing on electron-beam evaporated 193nm al2o3/mgf2 hr mirrors[J]. Acta physica sinica,2006,55(5):2639-2643. |
| APA | Shang, SZ,Shao, JD,Shen, J,Yi, K,&Fan, ZX.(2006).Effects of annealing on electron-beam evaporated 193nm al2o3/mgf2 hr mirrors.Acta physica sinica,55(5),2639-2643. |
| MLA | Shang, SZ,et al."Effects of annealing on electron-beam evaporated 193nm al2o3/mgf2 hr mirrors".Acta physica sinica 55.5(2006):2639-2643. |
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来源：中国科学院大学
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