The study of ion mixed amorphous carbon films on single crystal silicon by c ion implantation
文献类型：期刊论文
| 作者 | Sun, R; Xu, T; Zhang, JW; Xue, QJ |
| 刊名 | Applied surface science
 |
| 出版日期 | 2006-04-15 |
| 卷号 | 252期号:12页码:4236-4243 |
| 关键词 | Amorphous carbon film C+ implantation Single-crystal silicon Friction and wear |
| ISSN号 | 0169-4332 |
| DOI | 10.1016/j.apsusc.2005.06.037 |
| 通讯作者 | Xue, qj() |
| 英文摘要 | Amorphous-carbon (a-c) films were deposited on a single-crystal silicon substrate by vacuum vapor deposition system and these amorphous carbon films were implanted with 110 kev c+ at fluences of 1 x 10(17) ions/cm(2). the effect of ion mixing on the surface morphology, friction behavior and adhesion strengths of amorphous carbon films was examined making use of atomic force microscopy (afm), ball-on-disk reciprocating friction tester, nano-indentation system and scanning electron microscope (sem). the changes in chemical composition and structure were investigated by using x-ray photoelectron spectroscopy (xps). the results show that the anti-wear life and adhesion of amorphous carbon films on the si substrates were significantly increased by c ion implantation. the si-c chemical bonding across the interface plays a key role in the increase of adhesion strength and the anti-wear life of amorphous carbon film. the friction and wear mechanisms of amorphous carbon film under dry friction condition were also discussed. (c) 2005 elsevier b.v all rights reserved. |
| WOS关键词 | ENHANCED ADHESION ; N+ IMPLANTATION ; GLASSY-CARBON ; NI FILMS ; POLYSILICON ; FRICTION ; SURFACES ; SYSTEMS |
| WOS研究方向 | Chemistry ; Materials Science ; Physics |
| WOS类目 | Chemistry, Physical ; Materials Science, Coatings & Films ; Physics, Applied ; Physics, Condensed Matter |
| 语种 | 英语 |
| WOS记录号 | WOS:000237835100030 |
| 出版者 | ELSEVIER SCIENCE BV |
| URI标识 | http://www.irgrid.ac.cn/handle/1471x/2379634 |
| 专题 | 中国科学院大学 |
| 通讯作者 | Xue, QJ |
| 作者单位 | 1.Chinese Acad Sci, State Key Lab Solid Lubricat, Lanzhou Chem Phys, Lanzhou 730000, Peoples R China 2.Henan Univ, Lab Sepcial Funct Mat, Kaifeng 475001, Peoples R China 3.Chinese Acad Sci, Grad Sch, Beijing 100039, Peoples R China |
| 推荐引用方式 GB/T 7714 | Sun, R,Xu, T,Zhang, JW,et al. The study of ion mixed amorphous carbon films on single crystal silicon by c ion implantation[J]. Applied surface science,2006,252(12):4236-4243. |
| APA | Sun, R,Xu, T,Zhang, JW,&Xue, QJ.(2006).The study of ion mixed amorphous carbon films on single crystal silicon by c ion implantation.Applied surface science,252(12),4236-4243. |
| MLA | Sun, R,et al."The study of ion mixed amorphous carbon films on single crystal silicon by c ion implantation".Applied surface science 252.12(2006):4236-4243. |
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来源：中国科学院大学
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