A full cmos integration including isfet microsensors and interface circuit for biochemical applications
文献类型：期刊论文
| 作者 | Wei, Jinbao; Yang, Haigang; Sun, Hongguang; Lin, Zengjin; Xia, Shanhong |
| 刊名 | Rare metal materials and engineering
 |
| 出版日期 | 2006-12-01 |
| 卷号 | 35页码:443-446 |
| 关键词 | Isfet Interface circuit Integration and post processing |
| ISSN号 | 1002-185X |
| 通讯作者 | Yang, haigang(yanghg@mail.ie.ac.cn) |
| 英文摘要 | One of today's challenges, is the integration of isfets in chemical and biochemical microsystems. this article presents a full integration of isfet chip containing the isfet/refet (reference fet) pair, isfet/refet amplifiers, bias current generator, as well as a reference electrode structure, all integrated on the same chip based on cmos technology. the sensor chip was fabricated in a standard 0.35 mu m cmos process (chartered semiconductor, singapore). the extra post processing steps have been developed and added for depositing membranes. finally, the ph response of the integrated sensor was measured with the interface circuit. |
| WOS研究方向 | Materials Science ; Metallurgy & Metallurgical Engineering |
| WOS类目 | Materials Science, Multidisciplinary ; Metallurgy & Metallurgical Engineering |
| 语种 | 英语 |
| WOS记录号 | WOS:000244457000138 |
| 出版者 | NORTHWEST INST NONFERROUS METAL RESEARCH |
| URI标识 | http://www.irgrid.ac.cn/handle/1471x/2379799 |
| 专题 | 中国科学院大学 |
| 通讯作者 | Yang, Haigang |
| 作者单位 | 1.Chinese Acad Sci, Inst Elect, State Key Lab Transducer Technol, Beijing 100080, Peoples R China 2.Grad Univ, Chinese Acad Sci, Beijing 100039, Peoples R China |
| 推荐引用方式 GB/T 7714 | Wei, Jinbao,Yang, Haigang,Sun, Hongguang,et al. A full cmos integration including isfet microsensors and interface circuit for biochemical applications[J]. Rare metal materials and engineering,2006,35:443-446. |
| APA | Wei, Jinbao,Yang, Haigang,Sun, Hongguang,Lin, Zengjin,&Xia, Shanhong.(2006).A full cmos integration including isfet microsensors and interface circuit for biochemical applications.Rare metal materials and engineering,35,443-446. |
| MLA | Wei, Jinbao,et al."A full cmos integration including isfet microsensors and interface circuit for biochemical applications".Rare metal materials and engineering 35(2006):443-446. |
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来源：中国科学院大学
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