Extended bidirectional reflectance distribution function for subsurface defects scattering
文献类型：期刊论文
| 作者 | Shen, J; Liu, SJ; Kong, WJ; Shen, ZC; Shao, JD; Yao, J |
| 刊名 | Microelectronic engineering
 |
| 出版日期 | 2006-04-01 |
| 卷号 | 83期号:4-9页码:1047-1050 |
| 关键词 | Subsurface defect Polarized light scattering Bidirectional reflectance distribution function |
| ISSN号 | 0167-9317 |
| DOI | 10.1016/j.mee.2006.01.021 |
| 通讯作者 | Shen, j(shj@siom.ac.cn) |
| 英文摘要 | By introducing scattering probability and statistical distribution functions of substrate subsurface defects' radiuses, refractive indices and positions, an extended bidirectional reflectance distribution function (brdf) for polarized light scattering was derived on the foundation of jones scattering matrix. a numerical calculation example for the case of p-polarization incident light has been performed via monte carlo method. the results indicate that the extended brdf depends strongly on incident angle, scattering angle and azimuth angle, and presents a specific symmetry in terms of 180 degrees (azimuth angle). for real refractive index, the extended brdf is independent of subsurface defects' positions. and it will provide a more precise model for the calculation and measurement of polarized light scattering resulting from subsurface defects. (c) 2006 elsevier b.v. all rights reserved. |
| WOS关键词 | ANGLE-RESOLVED ELLIPSOMETRY ; LIGHT-SCATTERING ; SURFACE ; POLARIZATION ; COATINGS ; SMOOTH |
| WOS研究方向 | Engineering ; Science & Technology - Other Topics ; Optics ; Physics |
| WOS类目 | Engineering, Electrical & Electronic ; Nanoscience & Nanotechnology ; Optics ; Physics, Applied |
| 语种 | 英语 |
| WOS记录号 | WOS:000237581900100 |
| 出版者 | ELSEVIER SCIENCE BV |
| URI标识 | http://www.irgrid.ac.cn/handle/1471x/2379848 |
| 专题 | 中国科学院大学 |
| 通讯作者 | Shen, J |
| 作者单位 | 1.Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, R&D Ctr Opt Thin Film Coatings, Shanghai 201800, Peoples R China 2.Chinese Acad Sci, Grad Sch, Beijing 100039, Peoples R China 3.Univ Durham, Dept Phys, AIG, Durham DL1 3DJ, England |
| 推荐引用方式 GB/T 7714 | Shen, J,Liu, SJ,Kong, WJ,et al. Extended bidirectional reflectance distribution function for subsurface defects scattering[J]. Microelectronic engineering,2006,83(4-9):1047-1050. |
| APA | Shen, J,Liu, SJ,Kong, WJ,Shen, ZC,Shao, JD,&Yao, J.(2006).Extended bidirectional reflectance distribution function for subsurface defects scattering.Microelectronic engineering,83(4-9),1047-1050. |
| MLA | Shen, J,et al."Extended bidirectional reflectance distribution function for subsurface defects scattering".Microelectronic engineering 83.4-9(2006):1047-1050. |
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来源：中国科学院大学
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