Interface roughness, surface roughness and soft x-ray reflectivity of mo/si multilayers with different layer number
文献类型：期刊论文
| 作者 | Qin, Junling1,2; Shao, Jianda1; Yi, Kui1; Fan, Zhengxiu1 |
| 刊名 | Chinese optics letters
 |
| 出版日期 | 2007-05-10 |
| 卷号 | 5期号:5页码:301-303 |
| ISSN号 | 1671-7694 |
| 通讯作者 | Qin, junling(qinjl@siom.ac.cn) |
| 英文摘要 | A series of mo/si multilayers with the same periodic length and different periodic number were prepared by magnetron sputtering, whose top layers were respectively mo layer and si layer. periodic length and interface roughness of mo/si multilayers were determined by small angle x-ray diffraction (saxrd). surface roughness change curve of mo/si multilayer with increasing layer number was studied by atomic force microscope (afm). soft x-ray reflectivity of mo/si multilayers was measured in national synchrotron radiation laboratory (nsrl). theoretical and experimental results show that the soft x-ray reflectivity of mo/si multilayer is mainly determined by periodic number and interface roughness, surface roughness has little effect on reflectivity. |
| WOS关键词 | LITHOGRAPHY |
| WOS研究方向 | Optics |
| WOS类目 | Optics |
| 语种 | 英语 |
| WOS记录号 | WOS:000255023700018 |
| 出版者 | SCIENCE CHINA PRESS |
| URI标识 | http://www.irgrid.ac.cn/handle/1471x/2382144 |
| 专题 | 中国科学院大学 |
| 通讯作者 | Qin, Junling |
| 作者单位 | 1.Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, Shanghai 201800, Peoples R China 2.Chinese Acad Sci, Grad Sch, Beijing 100039, Peoples R China |
| 推荐引用方式 GB/T 7714 | Qin, Junling,Shao, Jianda,Yi, Kui,et al. Interface roughness, surface roughness and soft x-ray reflectivity of mo/si multilayers with different layer number[J]. Chinese optics letters,2007,5(5):301-303. |
| APA | Qin, Junling,Shao, Jianda,Yi, Kui,&Fan, Zhengxiu.(2007).Interface roughness, surface roughness and soft x-ray reflectivity of mo/si multilayers with different layer number.Chinese optics letters,5(5),301-303. |
| MLA | Qin, Junling,et al."Interface roughness, surface roughness and soft x-ray reflectivity of mo/si multilayers with different layer number".Chinese optics letters 5.5(2007):301-303. |
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来源：中国科学院大学
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