Real-time displacement measurement with large range and high accuracy using sinusoidal phase modulating laser diode interferometer
文献类型：期刊论文
| 作者 | He, Guotian1,3; Wang, Xiangzhao1,3; Zeng, Aijun2; Tang, Feng1; Huang, Bingjie1,3 |
| 刊名 | Chinese optics letters
 |
| 出版日期 | 2007-04-10 |
| 卷号 | 5期号:4页码:211-214 |
| ISSN号 | 1671-7694 |
| 通讯作者 | He, guotian(slhgt@siom.ac.cn) |
| 英文摘要 | To resolve the conflict of large measurement range and high accuracy in the existing real-time displacement measurement laser diode (ld) interferometers, a novel real-time displacement measurement ld interferometry is proposed and its measurement principle is analyzed. by use of a new phase demodulation algorithm and a new phase compensation algorithm of real-time phase unwrapping, the measurement accuracy is improved, and the measurement range is enlarged to a few wavelengths. in experiments, the peak-to-peak amplitude of the speaker vibration was 2361.7 nm, and the repeatability was 2.56 nm. the measurement time was less than 26 mu s. |
| WOS关键词 | SURFACE PROFILE MEASUREMENT ; DISTANCE MEASUREMENT ; WAVELENGTH |
| WOS研究方向 | Optics |
| WOS类目 | Optics |
| 语种 | 英语 |
| WOS记录号 | WOS:000255023600008 |
| 出版者 | SCIENCE CHINA PRESS |
| URI标识 | http://www.irgrid.ac.cn/handle/1471x/2382215 |
| 专题 | 中国科学院大学 |
| 通讯作者 | He, Guotian |
| 作者单位 | 1.Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, Shanghai 201800, Peoples R China 2.Shanghai Hengyi Opt & Fine Mech Co Ltd, Shanghai 201800, Peoples R China 3.Chinese Acad Sci, Grad Sch, Beijing 100039, Peoples R China |
| 推荐引用方式 GB/T 7714 | He, Guotian,Wang, Xiangzhao,Zeng, Aijun,et al. Real-time displacement measurement with large range and high accuracy using sinusoidal phase modulating laser diode interferometer[J]. Chinese optics letters,2007,5(4):211-214. |
| APA | He, Guotian,Wang, Xiangzhao,Zeng, Aijun,Tang, Feng,&Huang, Bingjie.(2007).Real-time displacement measurement with large range and high accuracy using sinusoidal phase modulating laser diode interferometer.Chinese optics letters,5(4),211-214. |
| MLA | He, Guotian,et al."Real-time displacement measurement with large range and high accuracy using sinusoidal phase modulating laser diode interferometer".Chinese optics letters 5.4(2007):211-214. |
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来源：中国科学院大学
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