Y2o3 stabilized zro2 thin films deposited by electron-beam evaporation: optical properties, structure and residual stresses
文献类型：期刊论文
| 作者 | Xiao, Qi-Ling1,2; Xu, Cheng1,2; Shao, Shu-Ying1; Shao, Jian-Da1; Fan, Zheng-Xiu1 |
| 刊名 | Vacuum
 |
| 出版日期 | 2008-09-26 |
| 卷号 | 83期号:2页码:366-371 |
| 关键词 | Ysz thin films Residual stress Electron-beam evaporation Refractive index Structural properties |
| ISSN号 | 0042-207X |
| DOI | 10.1016/j.vacuum.2008.05.031 |
| 通讯作者 | Xiao, qi-ling(xql324@126.com) |
| 英文摘要 | This paper describes the preparation and the characterization of y2o3 stabilized zro2 thin films produced by electric-beam evaporation method. the optical properties, microstructure, surface morphology and the residual stress of the deposited films were investigated by optical spectroscopy, x-ray diffraction (xrd), scanning probe microscope and optical interferometer. it is shown that the optical transmission spectra of all the ysz thin films are similar with those of zro2 thin film, possessing high transparency in the visible and near-infrared regions. the refractive index of the samples decreases with increasing of y2o3 content. the crystalline structure of pure zro2 films is a mixture of tetragonal phase and monoclinic phase, however, y2o3 stabilized zro2 thin films only exhibit the cubic phase independently of how much the added y2o3 content is. the surface morphology spectrum indicates that all thin films present a crystalline columnar texture with columnar grains perpendicular to the substrate and with a predominantly open microporosity. the residual stress of films transforms tensile from compressive with the increasing of y2o3 molar content, which corresponds to the evolutions of the structure and packing densities. (c) 2008 elsevier ltd. all rights reserved. |
| WOS关键词 | ZIRCONIUM DIOXIDE ; EB-PVD ; MICROSTRUCTURE ; GROWTH |
| WOS研究方向 | Materials Science ; Physics |
| WOS类目 | Materials Science, Multidisciplinary ; Physics, Applied |
| 语种 | 英语 |
| WOS记录号 | WOS:000260230400020 |
| 出版者 | PERGAMON-ELSEVIER SCIENCE LTD |
| URI标识 | http://www.irgrid.ac.cn/handle/1471x/2385268 |
| 专题 | 中国科学院大学 |
| 通讯作者 | Xiao, Qi-Ling |
| 作者单位 | 1.Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, Shanghai 201800, Peoples R China 2.Chinese Acad Sci, Grad Sch, Beijing 100039, Peoples R China |
| 推荐引用方式 GB/T 7714 | Xiao, Qi-Ling,Xu, Cheng,Shao, Shu-Ying,et al. Y2o3 stabilized zro2 thin films deposited by electron-beam evaporation: optical properties, structure and residual stresses[J]. Vacuum,2008,83(2):366-371. |
| APA | Xiao, Qi-Ling,Xu, Cheng,Shao, Shu-Ying,Shao, Jian-Da,&Fan, Zheng-Xiu.(2008).Y2o3 stabilized zro2 thin films deposited by electron-beam evaporation: optical properties, structure and residual stresses.Vacuum,83(2),366-371. |
| MLA | Xiao, Qi-Ling,et al."Y2o3 stabilized zro2 thin films deposited by electron-beam evaporation: optical properties, structure and residual stresses".Vacuum 83.2(2008):366-371. |
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来源：中国科学院大学
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