High temperature annealing effect on structure, optical property and laser-induced damage threshold of ta(2)o(5) films
文献类型：期刊论文
| 作者 | Xu, Cheng1,2; Xiao, Qiling1,2; Maa, Jianyong1,2; Jin, Yunxia1; Shao, Jianda1; Fan, Zhengxiu1 |
| 刊名 | Applied surface science
 |
| 出版日期 | 2008-08-15 |
| 卷号 | 254期号:20页码:6554-6559 |
| 关键词 | Ta(2)o(5) films Annealing Laser-induced damage threshold Scattering Absorption |
| ISSN号 | 0169-4332 |
| DOI | 10.1016/j.apsusc.2008.04.034 |
| 通讯作者 | Xu, cheng(xucheng@siom.ac.cn) |
| 英文摘要 | Ta(2)o(5) films were deposited by conventional electron beam evaporation method and then annealed in air at different temperature from 873 to 1273 k. it was found that the film structure changed from amorphous phase to hexagonal phase when annealed at 1073 k, then transformed to orthorhombic phase after annealed at 1273 k. the transmittance was improved after annealed at 873 k, and it decreased as the annealing temperature increased further. the total integrated scattering (tis) tests and afm results showed that both scattering and root mean square (rms) roughness of films increased with the annealing temperature increasing. x-ray photoelectron spectroscopy (xps) analysis showed that the film obtained better stoichiometry and the o/ta ratio increased to 2.50 after annealing. it was found that the laser-induced damage threshold (lidt) increased to the maximum when annealed at 873 k, while it decreased when the annealing temperature increased further. detailed damaged models dominated by different parameters during annealing were discussed. (c) 2008 elsevier b. v. all rights reserved. |
| WOS关键词 | PLASMA-DEPOSITED TA2O5 ; NB2O5 FILMS ; MICROSTRUCTURE ; COATINGS ; SI |
| WOS研究方向 | Chemistry ; Materials Science ; Physics |
| WOS类目 | Chemistry, Physical ; Materials Science, Coatings & Films ; Physics, Applied ; Physics, Condensed Matter |
| 语种 | 英语 |
| WOS记录号 | WOS:000257950100046 |
| 出版者 | ELSEVIER SCIENCE BV |
| URI标识 | http://www.irgrid.ac.cn/handle/1471x/2385485 |
| 专题 | 中国科学院大学 |
| 通讯作者 | Xu, Cheng |
| 作者单位 | 1.Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, Shanghai 201800, Peoples R China 2.Chinese Acad Sci, Grad Sch, Beijing 100049, Peoples R China |
| 推荐引用方式 GB/T 7714 | Xu, Cheng,Xiao, Qiling,Maa, Jianyong,et al. High temperature annealing effect on structure, optical property and laser-induced damage threshold of ta(2)o(5) films[J]. Applied surface science,2008,254(20):6554-6559. |
| APA | Xu, Cheng,Xiao, Qiling,Maa, Jianyong,Jin, Yunxia,Shao, Jianda,&Fan, Zhengxiu.(2008).High temperature annealing effect on structure, optical property and laser-induced damage threshold of ta(2)o(5) films.Applied surface science,254(20),6554-6559. |
| MLA | Xu, Cheng,et al."High temperature annealing effect on structure, optical property and laser-induced damage threshold of ta(2)o(5) films".Applied surface science 254.20(2008):6554-6559. |
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来源：中国科学院大学
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