Preparation of patterned tio2 thin films
文献类型：期刊论文
| 作者 | Liang Shan1,2; Chen Miao1 |
| 刊名 | Progress in chemistry
 |
| 出版日期 | 2008-11-01 |
| 卷号 | 20期号:11页码:1659-1665 |
| 关键词 | Patterned tio2 films Self assembly Photoresist Photosensitive films Soft lithography Microcontact printing |
| ISSN号 | 1005-281X |
| 通讯作者 | Liang shan() |
| 英文摘要 | This article provides an overview of various patterning methodologies of tio2 films. it is organized into three major sections: generation of patterns, replication of a mask, and replication of a master. generation of patterns is usually accomplished by serial techniques, including the writting process with a stylus, an electron beam or a laser beam, the self assembly process and the photoelectromchemistry process. the patterned features on a mask are mainly used to direct a flux of radiation or physical matter from a source onto a substrate. this method can be carried out with photoresists, self assembled monolayers, and photosensitive gel films of tio2. a master serves as the original for replication based on replica molding, transfer molding, molding in capillaries, microcontact printing and light stamping. the advantages and disadvantages of different methods are described, opinions for further studies on the preparation of patterned tio2 films are also presented. |
| WOS关键词 | SELF-ASSEMBLED MONOLAYERS ; SITE-SELECTIVE DEPOSITION ; FLEXIBLE POLYMER SUBSTRATE ; CHEMICAL-VAPOR-DEPOSITION ; ELECTRON-BEAM LITHOGRAPHY ; ATOMIC LAYER DEPOSITION ; TITANIUM-OXIDE FILMS ; SILICA-ON-TITANIA ; AQUEOUS-SOLUTION ; ANATASE TIO2 |
| WOS研究方向 | Chemistry |
| WOS类目 | Chemistry, Multidisciplinary |
| 语种 | 英语 |
| WOS记录号 | WOS:000261400900004 |
| 出版者 | CHINESE ACAD SCIENCES |
| URI标识 | http://www.irgrid.ac.cn/handle/1471x/2385499 |
| 专题 | 中国科学院大学 |
| 通讯作者 | Liang Shan |
| 作者单位 | 1.Chinese Acad Sci, Lanzhou Inst Chem Phys, State Key Lab Solid Lubricat, Lanzhou 730000, Peoples R China 2.Chinese Acad Sci, Grad Univ, Beijing 100039, Peoples R China |
| 推荐引用方式 GB/T 7714 | Liang Shan,Chen Miao. Preparation of patterned tio2 thin films[J]. Progress in chemistry,2008,20(11):1659-1665. |
| APA | Liang Shan,&Chen Miao.(2008).Preparation of patterned tio2 thin films.Progress in chemistry,20(11),1659-1665. |
| MLA | Liang Shan,et al."Preparation of patterned tio2 thin films".Progress in chemistry 20.11(2008):1659-1665. |
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来源：中国科学院大学
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