Study progress on sculptured thin films by glancing angle deposition
文献类型：期刊论文
| 作者 | Xiao Xiudi1,2; Dong Guoping1,2; Yu Hua1,2; Fan Zhengxiu1; He Hongbo1; Shao Jianda1 |
| 刊名 | Rare metal materials and engineering
 |
| 出版日期 | 2008-08-01 |
| 卷号 | 37期号:8页码:1317-1322 |
| 关键词 | Glancing angle deposition Sculptured thin film (stf) Anisotropy |
| ISSN号 | 1002-185X |
| 通讯作者 | Xiao xiudi(piaopiao1008@163.com) |
| 英文摘要 | Glancing angle deposition is a new technology for thin film preparation. the sculptured thin film (stf) with a variety of shape, such as oblique nanocolumns, zigzag, helix, s-shape, c-shape, and so on can be prepared by substrate rotating and sloping into glancing angle during process. the sculptured thin film with extraordinary optical properties provides a new direction for film design and preparation compared with traditional films. in this paper, the preparation method for sculptured thin film was summarized, the microstructure and preparation parameters of stf analyzed, also its potential application in optical field described. key |
| WOS关键词 | COLUMN ANGLE ; GROWTH ; ROTATION ; FILTERS |
| WOS研究方向 | Materials Science ; Metallurgy & Metallurgical Engineering |
| WOS类目 | Materials Science, Multidisciplinary ; Metallurgy & Metallurgical Engineering |
| 语种 | 英语 |
| WOS记录号 | WOS:000259154500001 |
| 出版者 | NORTHWEST INST NONFERROUS METAL RESEARCH |
| URI标识 | http://www.irgrid.ac.cn/handle/1471x/2386240 |
| 专题 | 中国科学院大学 |
| 通讯作者 | Xiao Xiudi |
| 作者单位 | 1.Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, Shanghai 201800, Peoples R China 2.Chinese Acad Sci, Grad Sch, Beijing 100039, Peoples R China |
| 推荐引用方式 GB/T 7714 | Xiao Xiudi,Dong Guoping,Yu Hua,et al. Study progress on sculptured thin films by glancing angle deposition[J]. Rare metal materials and engineering,2008,37(8):1317-1322. |
| APA | Xiao Xiudi,Dong Guoping,Yu Hua,Fan Zhengxiu,He Hongbo,&Shao Jianda.(2008).Study progress on sculptured thin films by glancing angle deposition.Rare metal materials and engineering,37(8),1317-1322. |
| MLA | Xiao Xiudi,et al."Study progress on sculptured thin films by glancing angle deposition".Rare metal materials and engineering 37.8(2008):1317-1322. |
入库方式： iSwitch采集
来源：中国科学院大学
浏览0
下载0
收藏0
其他版本
除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。