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Structural and optical properties of a-plane zno thin films synthesized on gamma-lialo(2) (302) substrates by low pressure metal-organic chemical vapor deposition

文献类型:期刊论文

作者Lin, Hui1,4; Zhou, Shengming1; Zhou, Jianhua1,4; Liu, Xuedong2,3; Gu, Shulin2,3; Zhu, Shunming2,3; Xie, Zili2,3; Han, Ping2,3; Zhang, Rong2,3
刊名Thin solid films
出版日期2008-07-31
卷号516期号:18页码:6079-6082
关键词A-plane zno thin films Structural and optical properties Gamma-lialo(2) (302) substrates Metal organic chemical vapor deposition X-ray diffraction Atomic force miscroscopy Raman spectroscopy
ISSN号0040-6090
DOI10.1016/j.tsf.2007.10.128
通讯作者Zhou, shengming(zhousm@mail.siom.ac.cn)
英文摘要Nonpolar a-plane (1120) zno thin films have been fabricated on gamma-lialo(2) (302) substrates via the low-pressure metal-organic chemical vapor deposition. an obvious intensity variation of the e(2) mode in the raman spectra indicates that there exhibits in-plane optical anisotropy in the a-plane zno thin films. highly-oriented uniform grains of rectangular shape can be seen from the atomic force microscopy images, which mean that the lateral growth rate of the thin films is also anisotropic. it is demonstrated experimentally that a buffer layer deposited at a low temperature (200 degrees c) can improve the structural and optical properties of the epilayer to a large extent. (c) 2007 elsevier b.v. all rights reserved.
WOS关键词DIODES ; GAN
WOS研究方向Materials Science ; Physics
WOS类目Materials Science, Multidisciplinary ; Materials Science, Coatings & Films ; Physics, Applied ; Physics, Condensed Matter
语种英语
WOS记录号WOS:000258037300025
出版者ELSEVIER SCIENCE SA
URI标识http://www.irgrid.ac.cn/handle/1471x/2388031
专题中国科学院大学
通讯作者Zhou, Shengming
作者单位1.Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, Shanghai 201800, Peoples R China
2.Nanjing Univ, Dept Phys, Nanjing 210093, Peoples R China
3.Nanjing Univ, Key Lab Adv Photon & Elect Mat, Nanjing 210093, Peoples R China
4.Chinese Acad Sci, Grad Sch, Beijing 100049, Peoples R China
推荐引用方式
GB/T 7714
Lin, Hui,Zhou, Shengming,Zhou, Jianhua,et al. Structural and optical properties of a-plane zno thin films synthesized on gamma-lialo(2) (302) substrates by low pressure metal-organic chemical vapor deposition[J]. Thin solid films,2008,516(18):6079-6082.
APA Lin, Hui.,Zhou, Shengming.,Zhou, Jianhua.,Liu, Xuedong.,Gu, Shulin.,...&Zhang, Rong.(2008).Structural and optical properties of a-plane zno thin films synthesized on gamma-lialo(2) (302) substrates by low pressure metal-organic chemical vapor deposition.Thin solid films,516(18),6079-6082.
MLA Lin, Hui,et al."Structural and optical properties of a-plane zno thin films synthesized on gamma-lialo(2) (302) substrates by low pressure metal-organic chemical vapor deposition".Thin solid films 516.18(2008):6079-6082.

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来源:中国科学院大学

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