Fabrication of microelectrodes deeply embedded in linbo(3) using a femtosecond laser
文献类型：期刊论文
| 作者 | Liao, Yang1,2; Xu, Jian1,2; Sun, Haiyi1; Song, Juan1,2; Wang, Xinshun1,2; Cheng, Ya1 |
| 刊名 | Applied surface science
 |
| 出版日期 | 2008-08-30 |
| 卷号 | 254期号:21页码:7018-7021 |
| 关键词 | Selective electroless plating Femtosecond pulsed laser Microelectrode Lithium niobate |
| ISSN号 | 0169-4332 |
| DOI | 10.1016/j.apsusc.2008.05.122 |
| 通讯作者 | Cheng, ya(ycheng-45277@hotmail.com) |
| 英文摘要 | We present a novel technique to fabricate deeply embedded microelectrodes in linbo(3) using femtosecond pulsed laser ablation and selective electroless plating. the fabrication process mainly consists of four steps, which are (1) micromachining of microgrooves on the surface of linbo(3) by femtosecond laser ablation; (2) formation of agno(3) films on substrates; (3) scanning the femtosecond laser beam in the fabricated microgrooves for modi. cation of the inner surfaces; and (4) electroless copper plating. the void-free electroless copper plating is obtained with appropriate cross section of microgrooves and uniform initiation of the autocatalytic deposition on the inner surface of grooves. the dimension and shape of the microelectrodes could be accurately controlled by changing the conditions of femtosecond laser ablation, which in turn can control the distribution of electric field inside linbo(3) crystal for various applications, opening up a new approach to fabricate three-dimensional integrated electro-optic devices. (c) 2008 elsevier b. v. all rights reserved. |
| WOS关键词 | OPTICAL SUPERLATTICE LINBO3 ; GLASS ; PULSES ; METALLIZATION ; DEPOSITION |
| WOS研究方向 | Chemistry ; Materials Science ; Physics |
| WOS类目 | Chemistry, Physical ; Materials Science, Coatings & Films ; Physics, Applied ; Physics, Condensed Matter |
| 语种 | 英语 |
| WOS记录号 | WOS:000258997700059 |
| 出版者 | ELSEVIER SCIENCE BV |
| URI标识 | http://www.irgrid.ac.cn/handle/1471x/2388713 |
| 专题 | 中国科学院大学 |
| 通讯作者 | Cheng, Ya |
| 作者单位 | 1.Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, State Key Lab High Field Laser Phys, Shanghai 201800, Peoples R China 2.Chinese Acad Sci, Grad Sch, Beijing 100039, Peoples R China |
| 推荐引用方式 GB/T 7714 | Liao, Yang,Xu, Jian,Sun, Haiyi,et al. Fabrication of microelectrodes deeply embedded in linbo(3) using a femtosecond laser[J]. Applied surface science,2008,254(21):7018-7021. |
| APA | Liao, Yang,Xu, Jian,Sun, Haiyi,Song, Juan,Wang, Xinshun,&Cheng, Ya.(2008).Fabrication of microelectrodes deeply embedded in linbo(3) using a femtosecond laser.Applied surface science,254(21),7018-7021. |
| MLA | Liao, Yang,et al."Fabrication of microelectrodes deeply embedded in linbo(3) using a femtosecond laser".Applied surface science 254.21(2008):7018-7021. |
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来源：中国科学院大学
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