Influences of co2 laser annealing on mechanical and laser-induced damage properties of zro2 thin films
文献类型：期刊论文
| 作者 | Wei, Chaoyang1,2; Deng, Degang1,2; Tian, Guanglei1,2; He, Hongbo1; Shao, Jianda1; Fan, Zhengxiu1 |
| 刊名 | Optik
 |
| 出版日期 | 2008 |
| 卷号 | 119期号:13页码:624-629 |
| 关键词 | Co2 laser annealing Weak absorption Laser-induced damage threshold Residual stress |
| ISSN号 | 0030-4026 |
| DOI | 10.1016/j.ijleo.2007.04.005 |
| 通讯作者 | Wei, chaoyang(siomwei@mail.siom.ac.cn) |
| 英文摘要 | Zirconium dioxide (zro2) thin films were deposited on bk7 glass substrates by the electron beam evaporation method. a continuous wave co2 laser was used to anneal the zro2 thin films to investigate whether beneficial changes could be produced. after annealing at different laser scanning speeds by co2 laser, weak absorption of the coatings was measured by the surface thermal lensing (stl) technique, and then laser-induced damage threshold (lidt) was also determined. it was found that the weak absorption decreased first, while the laser scanning speed is below some value, then increased. the lidt of the zro2 coatings decreased greatly when the laser scanning speeds were below some value. a nomarski microscope was employed to map the damage morphology, and it was found that the damage behavior was defect-initiated both for annealed and as-deposited samples. the influences of post-deposition co2 laser annealing on the structural and mechanical properties of the films have also been investigated by x-ray diffraction and zygo interferometer. it was found that the microstructure of the zro2 films did not change. the residual stress in zro2 films showed a tendency from tensile to compressive after co, laser annealing, and the variation quantity of the residual stress increased with decreasing laser scanning speed. the residual stress may be mitigated to some extent at proper treatment parameters. (c) 2007 elsevier gmbh. all rights reserved. |
| WOS关键词 | OPTICAL-PROPERTIES ; MICROSTRUCTURE ; COATINGS ; TEMPERATURE ; RESISTANCE ; RADIATION |
| WOS研究方向 | Optics |
| WOS类目 | Optics |
| 语种 | 英语 |
| WOS记录号 | WOS:000260036400005 |
| 出版者 | ELSEVIER GMBH, URBAN & FISCHER VERLAG |
| URI标识 | http://www.irgrid.ac.cn/handle/1471x/2388967 |
| 专题 | 中国科学院大学 |
| 通讯作者 | Wei, Chaoyang |
| 作者单位 | 1.Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, R&D Ctr Opt Thin Film Coatings, Shanghai 201800, Peoples R China 2.Chinese Acad Sci, Grad Sch, Beijing 100039, Peoples R China |
| 推荐引用方式 GB/T 7714 | Wei, Chaoyang,Deng, Degang,Tian, Guanglei,et al. Influences of co2 laser annealing on mechanical and laser-induced damage properties of zro2 thin films[J]. Optik,2008,119(13):624-629. |
| APA | Wei, Chaoyang,Deng, Degang,Tian, Guanglei,He, Hongbo,Shao, Jianda,&Fan, Zhengxiu.(2008).Influences of co2 laser annealing on mechanical and laser-induced damage properties of zro2 thin films.Optik,119(13),624-629. |
| MLA | Wei, Chaoyang,et al."Influences of co2 laser annealing on mechanical and laser-induced damage properties of zro2 thin films".Optik 119.13(2008):624-629. |
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来源：中国科学院大学
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