A simple photolithography method for microfluidic device fabrication using sunlight as UV source
文献类型：期刊论文
| 作者 | Ma, Jingyun; Jiang, Lei; Pan, Xiaoyan; Ma, Huipeng; Lin, Bingcheng; Qin, Jianhua |
| 刊名 | microfluidics and nanofluidics
 |
| 出版日期 | 2010-12-01 |
| 卷号 | 9期号:6页码:1247-1252 |
| 关键词 | Microfabrication Photolithography Sunlight-photolithography |
| 产权排序 | 1;1 |
| 通讯作者 | 秦建华 |
| 英文摘要 | a straightforward method for microfluidic devices fabrication using sunlight as the ultraviolet (uv) source is established in this work. this method is based on photolithography, but obviates the need for specialized uv exposure facility. substrates coated with photoresist were placed directly under sun in a perpendicular direction to the sunlight for exposure. exposure conditions were optimized for patterning features with different kinds of photoresist, photoresist of different thicknesses and dimensions. exposure time can be adjusted to obtain designed features on a mask with good lateral structure according to the energy measured by uv meter (with a constant intensity of uv in sunlight). masters produced under optimum exposure conditions were used for the fabrication of several microfluidic devices with different materials, structures, or functions. resultant devices were shown eminently suitable for microfluidic applications such as electrophoretic separation, multiple gradient generator, and pneumatic valve-based cell culture. this photolithographic method is simple, low cost, easy to operate, and environmental friendly. especially, the masters can be obtained in parallel simultaneously, which is suitable for chip fabrication for mass production. it is also more attractive for the laboratories, in which the support for photolithographic facility is not available. |
| WOS标题词 | science & technology ; technology ; physical sciences |
| 类目[WOS] | nanoscience & nanotechnology ; instruments & instrumentation ; physics, fluids & plasmas |
| 研究领域[WOS] | science & technology - other topics ; instruments & instrumentation ; physics |
| 收录类别 | SCI |
| 原文出处 | false |
| 语种 | 英语 |
| WOS记录号 | WOS:000284335800020 |
| 公开日期 | 2010-11-30 |
| 源URL | [http://159.226.238.44/handle/321008/103431]  |
| 专题 | 大连化学物理研究所_中国科学院大连化学物理研究所 |
| 作者单位 | Chinese Acad Sci, Dalian Inst Chem Phys, Dalian, Peoples R China |
| 推荐引用方式 GB/T 7714 | Ma, Jingyun,Jiang, Lei,Pan, Xiaoyan,et al. A simple photolithography method for microfluidic device fabrication using sunlight as UV source[J]. microfluidics and nanofluidics,2010,9(6):1247-1252. |
| APA | Ma, Jingyun,Jiang, Lei,Pan, Xiaoyan,Ma, Huipeng,Lin, Bingcheng,&Qin, Jianhua.(2010).A simple photolithography method for microfluidic device fabrication using sunlight as UV source.microfluidics and nanofluidics,9(6),1247-1252. |
| MLA | Ma, Jingyun,et al."A simple photolithography method for microfluidic device fabrication using sunlight as UV source".microfluidics and nanofluidics 9.6(2010):1247-1252. |
入库方式： OAI收割
来源：大连化学物理研究所
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