Effects of deposition temperatures on laser damage threshold of tio2/sio2 high reflectors
文献类型:期刊论文
作者 | Yao, J. K.1,2; Xu, C.1,2; Qiang, Z. W.1,2; Ma, J. Y.1,2; Lv, G. N.1,2; Wang, Y. Z.1,2; He, H. B.1; Shao, J. D.1 |
刊名 | Surface engineering
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出版日期 | 2008 |
卷号 | 24期号:1页码:63-65 |
关键词 | Tio2/sio2 high reflectors Laser damage Deposition temperature Electron beam evaporation |
ISSN号 | 0267-0844 |
DOI | 10.1179/174329408x271435 |
通讯作者 | Yao, j. k.(yjk@siom.ac.cn) |
英文摘要 | Tio2 single layers and tio2/sio2 high reflectors are prepared by electron beam evaporation at different tio2 deposition temperatures. it is found that the changes of properties of tio2 films with the increase in deposition temperature, such as the appearance of anatase crystal, the increase in refractive index and extinction coefficient and the decrease in physical thickness, leads to the spectrum shift and reflectivity bandwidth broadening of high reflectors together with the increase in scattering and absorption and the decrease in laser induced damage threshold. |
WOS关键词 | FILMS ; TIO2 ; EVAPORATION |
WOS研究方向 | Materials Science |
WOS类目 | Materials Science, Coatings & Films |
语种 | 英语 |
WOS记录号 | WOS:000255514900013 |
出版者 | MANEY PUBLISHING |
URI标识 | http://www.irgrid.ac.cn/handle/1471x/2392626 |
专题 | 中国科学院大学 |
通讯作者 | Yao, J. K. |
作者单位 | 1.Shanghai Inst Opt & Fine Mech, R&D Ctr Opt Thin Film Coatings, Shanghai 201800, Peoples R China 2.Chinese Acad Sci, Grad Sch, Beijing 100080, Peoples R China |
推荐引用方式 GB/T 7714 | Yao, J. K.,Xu, C.,Qiang, Z. W.,et al. Effects of deposition temperatures on laser damage threshold of tio2/sio2 high reflectors[J]. Surface engineering,2008,24(1):63-65. |
APA | Yao, J. K..,Xu, C..,Qiang, Z. W..,Ma, J. Y..,Lv, G. N..,...&Shao, J. D..(2008).Effects of deposition temperatures on laser damage threshold of tio2/sio2 high reflectors.Surface engineering,24(1),63-65. |
MLA | Yao, J. K.,et al."Effects of deposition temperatures on laser damage threshold of tio2/sio2 high reflectors".Surface engineering 24.1(2008):63-65. |
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来源:中国科学院大学
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