A novel x-axis tuning fork gyroscope with "8 vertical springs-proofmass" structure on (111) silicon
文献类型：期刊论文
| 作者 | Duan, Fei1,2; Jiao, Jiwei1; Wang, Yucai1,2; Zhang, Ying1; Mi, Binwei1; Li, Jinpeng1,2; Wang, Yuelin1 |
| 刊名 | Microsystem technologies-micro-and nanosystems-information storage and processing systems
 |
| 出版日期 | 2008-07-01 |
| 卷号 | 14期号:7页码:1009-1013 |
| ISSN号 | 0946-7076 |
| DOI | 10.1007/s00542-007-0527-6 |
| 通讯作者 | Jiao, jiwei(jiaojw@mail.sim.ac.cn) |
| 英文摘要 | A novel x-axis tuning fork gyroscope with "8 vertical springs-proofmass" structure is presented. wafer-thick proofmasses are made out of (111) silicon with bulk micromachining processes to achieve lower thermo-mechanical noise. each proofmass is supported by 8 vertical springs, which are symmetrically distributed around the proofmass. the dimensions of 8 vertical springs are precisely confined by thermal oxide protected sidewalls and the extreme slowly etched (111)-planes in koh etching. a mode mismatch of less than 30 hz is achieved before tuning. initial test shows a sensitivity of 0.15 mv/(deg/s) and a rate resolution around 0.1 deg/s under atmosphere pressure. |
| WOS关键词 | SBM PROCESS ; SILICON |
| WOS研究方向 | Engineering ; Science & Technology - Other Topics ; Materials Science ; Physics |
| WOS类目 | Engineering, Electrical & Electronic ; Nanoscience & Nanotechnology ; Materials Science, Multidisciplinary ; Physics, Applied |
| 语种 | 英语 |
| WOS记录号 | WOS:000256090900018 |
| 出版者 | SPRINGER |
| URI标识 | http://www.irgrid.ac.cn/handle/1471x/2392810 |
| 专题 | 中国科学院大学 |
| 通讯作者 | Jiao, Jiwei |
| 作者单位 | 1.Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, State Key Lab Transducer Technol, Shanghai 200050, Peoples R China 2.Chinese Acad Sci, Grad Sch, Beijing 100039, Peoples R China |
| 推荐引用方式 GB/T 7714 | Duan, Fei,Jiao, Jiwei,Wang, Yucai,et al. A novel x-axis tuning fork gyroscope with "8 vertical springs-proofmass" structure on (111) silicon[J]. Microsystem technologies-micro-and nanosystems-information storage and processing systems,2008,14(7):1009-1013. |
| APA | Duan, Fei.,Jiao, Jiwei.,Wang, Yucai.,Zhang, Ying.,Mi, Binwei.,...&Wang, Yuelin.(2008).A novel x-axis tuning fork gyroscope with "8 vertical springs-proofmass" structure on (111) silicon.Microsystem technologies-micro-and nanosystems-information storage and processing systems,14(7),1009-1013. |
| MLA | Duan, Fei,et al."A novel x-axis tuning fork gyroscope with "8 vertical springs-proofmass" structure on (111) silicon".Microsystem technologies-micro-and nanosystems-information storage and processing systems 14.7(2008):1009-1013. |
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来源：中国科学院大学
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