Effect of amorphous c films deposited by rf magnetron sputtering on smoothing k9 glass substrate
文献类型：期刊论文
| 作者 | Deng, Songwen1,2; Qi, Hongji1; Wei, Chaoyang1; Yi, Kui1; Fan, Zhengxiu1; Shao, Jianda1 |
| 刊名 | Applied surface science
 |
| 出版日期 | 2009-12-15 |
| 卷号 | 256期号:5页码:1492-1495 |
| 关键词 | Roughness Smoothing effect C film Soft x-ray multilayer reflector |
| ISSN号 | 0169-4332 |
| DOI | 10.1016/j.apsusc.2009.09.009 |
| 通讯作者 | Shao, jianda(buaa_dsw@163.com) |
| 英文摘要 | Soft x-ray multilayer reflectors must be deposited on super-smooth surface such as super-polished silicon wafers or glasses, which are complicate, time-consuming and expensive to produce. to overcome this shortage, c films deposited by rf magnetron sputtering were considered to smooth the k9 glass substrates' surface in the present paper. the structure of c films was systematically studied by xrd and raman spectrum. the surface morphology and rms-roughness were obtained by afm. then, we calculated the impact of the c layers on the reflectivity curve of mo/si soft x-ray multilayer reflector around 13.5 nm. the c films exhibit typical amorphous state. with the increasing of power and thickness, the content of sp3 hybrid bonding decreases while the amount or size of well-organized graphite clusters increases. the surface rms-roughness decreases from 2.4 nm to 0.62 nm after smoothed by an 80 nm thick c layer deposited in 500 w, which is the smoothest c layer surface we have obtained. the calculation results show that the theoretical normal incidence reflectivity of mo/si multilayer at 13.5 nm increases from 7% to 63%. (c) 2009 elsevier b.v. all rights reserved. |
| WOS关键词 | RAY MULTILAYER MIRRORS ; CARBON BUFFER LAYERS |
| WOS研究方向 | Chemistry ; Materials Science ; Physics |
| WOS类目 | Chemistry, Physical ; Materials Science, Coatings & Films ; Physics, Applied ; Physics, Condensed Matter |
| 语种 | 英语 |
| WOS记录号 | WOS:000272345400042 |
| 出版者 | ELSEVIER SCIENCE BV |
| URI标识 | http://www.irgrid.ac.cn/handle/1471x/2395082 |
| 专题 | 中国科学院大学 |
| 通讯作者 | Shao, Jianda |
| 作者单位 | 1.Chinese Acad Sci, Opt Films Technol R&D Ctr, Shanghai Inst Opt & Fine Mech, Shanghai 201800, Peoples R China 2.Chinese Acad Sci, Grad Sch, Beijing 100038, Peoples R China |
| 推荐引用方式 GB/T 7714 | Deng, Songwen,Qi, Hongji,Wei, Chaoyang,et al. Effect of amorphous c films deposited by rf magnetron sputtering on smoothing k9 glass substrate[J]. Applied surface science,2009,256(5):1492-1495. |
| APA | Deng, Songwen,Qi, Hongji,Wei, Chaoyang,Yi, Kui,Fan, Zhengxiu,&Shao, Jianda.(2009).Effect of amorphous c films deposited by rf magnetron sputtering on smoothing k9 glass substrate.Applied surface science,256(5),1492-1495. |
| MLA | Deng, Songwen,et al."Effect of amorphous c films deposited by rf magnetron sputtering on smoothing k9 glass substrate".Applied surface science 256.5(2009):1492-1495. |
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来源：中国科学院大学
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