Influence of methane flow on the microstructure and properties of tial-doped a-c:h films deposited by middle frequency reactive magnetron sputtering
文献类型：期刊论文
| 作者 | Pang, Xianjuan1,2; Shi, Lei1; Wang, Peng1; Xia, Yanqiu1; Liu, Weimin1 |
| 刊名 | Surface and interface analysis
 |
| 出版日期 | 2009-12-01 |
| 卷号 | 41期号:12-13页码:924-930 |
| ISSN号 | 0142-2421 |
| 关键词 | Magnetron sputtering Hydrogenated tial-doped a-c:h film Structure Tribological properties |
| DOI | 10.1002/sia.3120 |
| 通讯作者 | Liu, weimin(wmliu@lzb.ac.cn) |
| 英文摘要 | Hydrogenated tial-doped a-c:h films were deposited on si substrates by middle frequency magnetron sputtering tial target in argon and methane gas mixture atmosphere. the surface morphology, hardness, chemical nature and bond types of the films were characterized by means of atomic force microscopy (afm), xps, raman spectroscopy and nanoindentation. the friction and wear behaviors of the deposited films were characterized on an umt-2mt test system. sem was utilized to analyze the wear scar and debris on steel balls after sliding on the deposited films under dry friction conditions. the wear rate of the deposited films was calculated from traces of surface profiles taken across the wear track using an optical profile. the results demonstrated that the film deposited at 60 sccm methane flow exhibited higher hardness, as well as low friction coefficient and wear rate, which is attributed to the formation of a graphitized transfer layer. copyright (c) 2009 john wiley & sons, ltd. |
| WOS关键词 | DIAMOND-LIKE CARBON ; CATHODIC VACUUM-ARC ; AMORPHOUS-CARBON ; MECHANICAL-PROPERTIES ; NANOCOMPOSITE FILMS ; BIAS VOLTAGE ; THIN-FILMS ; COMPOSITE FILMS ; SUBSTRATE BIAS ; H FILMS |
| WOS研究方向 | Chemistry |
| WOS类目 | Chemistry, Physical |
| 语种 | 英语 |
| 出版者 | JOHN WILEY & SONS LTD |
| WOS记录号 | WOS:000272578600004 |
| URI标识 | http://www.irgrid.ac.cn/handle/1471x/2395248 |
| 专题 | 中国科学院大学 |
| 通讯作者 | Liu, Weimin |
| 作者单位 | 1.Chinese Acad Sci, Lanzhou Inst Chem Phys, State Key Lab Solid Lubricat, Lanzhou 730000, Peoples R China 2.Chinese Acad Sci, Grad Sch, Beijing 100039, Peoples R China |
| 推荐引用方式 GB/T 7714 | Pang, Xianjuan,Shi, Lei,Wang, Peng,et al. Influence of methane flow on the microstructure and properties of tial-doped a-c:h films deposited by middle frequency reactive magnetron sputtering[J]. Surface and interface analysis,2009,41(12-13):924-930. |
| APA | Pang, Xianjuan,Shi, Lei,Wang, Peng,Xia, Yanqiu,&Liu, Weimin.(2009).Influence of methane flow on the microstructure and properties of tial-doped a-c:h films deposited by middle frequency reactive magnetron sputtering.Surface and interface analysis,41(12-13),924-930. |
| MLA | Pang, Xianjuan,et al."Influence of methane flow on the microstructure and properties of tial-doped a-c:h films deposited by middle frequency reactive magnetron sputtering".Surface and interface analysis 41.12-13(2009):924-930. |
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来源：中国科学院大学
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