中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Synthesis and elastic properties of v2alc thin films by magnetron sputtering from elemental targets

文献类型:期刊论文

作者Sigumonrong, Darwin P.1; Zhang, Jie2,3; Zhou, Yanchun2; Music, Denis1; Schneider, Jochen M.1
刊名Journal of physics d-applied physics
出版日期2009-09-21
卷号42期号:18页码:8
ISSN号0022-3727
DOI10.1088/0022-3727/42/18/185408
通讯作者Sigumonrong, darwin p.()
英文摘要The influence of deposition temperature on phase formation of v2alc is studied by magnetron sputtering from elemental targets. at substrate temperatures below 750 degrees c, we observed the formation of alxvy and v2c using x-ray diffraction (xrd) analysis. at 750 degrees c, a phase pure polycrystalline v2alc film on a similar to 12 nm thick transition layer has been observed using xrd and transmission electron microscopy. selected area electron diffraction indicates that the film grown on the transition layer consists of phase pure v2alc. as the substrate temperature is increased to 850 degrees c, the formation of v2c in addition to the v2alc phase is observed. this may be due to desorption of aluminium causing the decomposition of v2alc into vanadium carbides and aluminium. the v2alc film is fully dense and polycrystalline and the elastic modulus based on nanoindentation is within the expected error margin consistent with previously reported theoretical calculations and the diamond anvil cell measurement of bulk v2alc samples.
WOS关键词INITIO MOLECULAR-DYNAMICS ; CHEMICAL-VAPOR-DEPOSITION ; AUGMENTED-WAVE METHOD ; MECHANICAL-PROPERTIES ; ELECTRONIC-PROPERTIES ; TRANSITION-METALS ; TERNARY CERAMICS ; VANADIUM CARBIDE ; GAS-MIXTURES ; AL-C
WOS研究方向Physics
WOS类目Physics, Applied
语种英语
WOS记录号WOS:000269557000051
出版者IOP PUBLISHING LTD
URI标识http://www.irgrid.ac.cn/handle/1471x/2397248
专题中国科学院大学
通讯作者Sigumonrong, Darwin P.
作者单位1.Rhein Westfal TH Aachen, D-52074 Aachen, Germany
2.Chinese Acad Sci, Inst Met Res, Shenyang Natl Lab Mat, Shenyang 110016, Peoples R China
3.Chinese Acad Sci, Grad Sch, Beijing 100039, Peoples R China
推荐引用方式
GB/T 7714
Sigumonrong, Darwin P.,Zhang, Jie,Zhou, Yanchun,et al. Synthesis and elastic properties of v2alc thin films by magnetron sputtering from elemental targets[J]. Journal of physics d-applied physics,2009,42(18):8.
APA Sigumonrong, Darwin P.,Zhang, Jie,Zhou, Yanchun,Music, Denis,&Schneider, Jochen M..(2009).Synthesis and elastic properties of v2alc thin films by magnetron sputtering from elemental targets.Journal of physics d-applied physics,42(18),8.
MLA Sigumonrong, Darwin P.,et al."Synthesis and elastic properties of v2alc thin films by magnetron sputtering from elemental targets".Journal of physics d-applied physics 42.18(2009):8.

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来源:中国科学院大学

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