Design of broadband and broad angular cr/c multilayer reflector for "near water window" region
文献类型：期刊论文
| 作者 | Deng, Songwen1,2; Qi, Hongji1; Wei, Chaoyang1; Yi, Kui1; Fan, Zhengxiu1; Shao, Jianda1 |
| 刊名 | Optics communications
 |
| 出版日期 | 2009-09-01 |
| 卷号 | 282期号:17页码:3513-3517 |
| 关键词 | Multilayer reflector Soft x-ray Broad band Broad angular |
| ISSN号 | 0030-4018 |
| DOI | 10.1016/j.optcom.2009.06.007 |
| 通讯作者 | Shao, jianda(buaa_dsw@163.com) |
| 英文摘要 | Traditional periodic multilayer reflector working in the soft x-ray region should be placed at the designed incidence angle and wavelength, which is extremely difficult and complicate in practice especially for "near water window region" (4.43-6.50 nm). in this region, ni-like-ta laser working at the wavelength 4,48 nm provides a possible source which has caught a lot attention. in this paper, to overcome the shortcoming of the periodic structure, top-flat broad band (normal incidence) and broad angular (around quasi-brewster angle) cr/c non-periodic multilayer reflector have been designed for the 4.48 nm soft x-ray optical system. in the wavelength region 4.473-4.488 nm, 4.455-4.496 nm and 4.435-4.529 nm, mean theoretical normal-incidence reflectivity can get 35.0%. 24.2% and 12.6%, respectively, by the top-flat broad band reflectors. in the grazing incidence angle region 44.85-45.16 degrees, 44.54-45.46 degrees and 44.02-45.98 degrees, mean s-component theoretical reflectivity at 4.48 nm can get 39.7%, 23.1% and 13.0%, respectively, by the top-flat broad angular reflectors. (c) 2009 elsevier b.v. all rights reserved. |
| WOS关键词 | BEAM SPUTTER-DEPOSITION ; EUV MASK BLANKS ; SOFT-X-RAY ; RANGE |
| WOS研究方向 | Optics |
| WOS类目 | Optics |
| 语种 | 英语 |
| WOS记录号 | WOS:000268943000022 |
| 出版者 | ELSEVIER SCIENCE BV |
| URI标识 | http://www.irgrid.ac.cn/handle/1471x/2398024 |
| 专题 | 中国科学院大学 |
| 通讯作者 | Shao, Jianda |
| 作者单位 | 1.Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, Opt Films Technol R&D Ctr, Shanghai 201800, Peoples R China 2.Chinese Acad Sci, Grad Sch, Beijing 100038, Peoples R China |
| 推荐引用方式 GB/T 7714 | Deng, Songwen,Qi, Hongji,Wei, Chaoyang,et al. Design of broadband and broad angular cr/c multilayer reflector for "near water window" region[J]. Optics communications,2009,282(17):3513-3517. |
| APA | Deng, Songwen,Qi, Hongji,Wei, Chaoyang,Yi, Kui,Fan, Zhengxiu,&Shao, Jianda.(2009).Design of broadband and broad angular cr/c multilayer reflector for "near water window" region.Optics communications,282(17),3513-3517. |
| MLA | Deng, Songwen,et al."Design of broadband and broad angular cr/c multilayer reflector for "near water window" region".Optics communications 282.17(2009):3513-3517. |
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来源：中国科学院大学
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