Influences of y2o3 dopant content on residual stress, structure, and optical properties of zro2 thin films
文献类型：期刊论文
| 作者 | Xiao, Qiling1,2; Shao, Shuying1; Shao, Jianda1; Fan, Zhengxiu1 |
| 刊名 | Chinese optics letters
 |
| 出版日期 | 2009-02-10 |
| 卷号 | 7期号:2页码:162-164 |
| ISSN号 | 1671-7694 |
| DOI | 10.3788/col20090702.0162 |
| 通讯作者 | Xiao, qiling(xql324@126.com) |
| 英文摘要 | Four kinds of y2o3 stabilized zro2 (ysz) thin films with different y2o3 contents (from 0 to 12 mol%) are deposited on bk7 glass substrates by electron-beam evaporation method. the effects of different y2o3 dopant contents on residual stress, structure, and optical properties of zro2 thin films are investigated. the results show that residual stress in ysz thin films varies from tensile to compressive with the increase of y2o3 molar content,. the addition of y2o3 is beneficial to the crystallization of ysz thin film and transformation from amorphous to high temperature phase, and the refractive index decreases with the increase of y2o3 molar content. moreover, the variations of residual stress and the shifts of refractive index correspond to the evolution of structures induced by the addition of y2o3. |
| WOS研究方向 | Optics |
| WOS类目 | Optics |
| 语种 | 英语 |
| WOS记录号 | WOS:000266970600021 |
| 出版者 | CHINESE LASER PRESS |
| URI标识 | http://www.irgrid.ac.cn/handle/1471x/2398600 |
| 专题 | 中国科学院大学 |
| 通讯作者 | Xiao, Qiling |
| 作者单位 | 1.Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, R&D Ctr Opt Thin Film Coatings, Shanghai 201800, Peoples R China 2.Chinese Acad Sci, Grad Univ, Beijing 100049, Peoples R China |
| 推荐引用方式 GB/T 7714 | Xiao, Qiling,Shao, Shuying,Shao, Jianda,et al. Influences of y2o3 dopant content on residual stress, structure, and optical properties of zro2 thin films[J]. Chinese optics letters,2009,7(2):162-164. |
| APA | Xiao, Qiling,Shao, Shuying,Shao, Jianda,&Fan, Zhengxiu.(2009).Influences of y2o3 dopant content on residual stress, structure, and optical properties of zro2 thin films.Chinese optics letters,7(2),162-164. |
| MLA | Xiao, Qiling,et al."Influences of y2o3 dopant content on residual stress, structure, and optical properties of zro2 thin films".Chinese optics letters 7.2(2009):162-164. |
入库方式： iSwitch采集
来源：中国科学院大学
浏览0
下载0
收藏0
其他版本
除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。