Silicon nanorods prepared by glancing angle catalytic chemical vapor deposition
文献类型：期刊论文
| 作者 | Liu, Fengzhen1; Ma, Yanhong1; Zhu, Meifang1; Yin, Penggang2 |
| 刊名 | Thin solid films
 |
| 出版日期 | 2009-04-30 |
| 卷号 | 517期号:12页码:3492-3495 |
| 关键词 | Silicon nanorods Cat-cvd Glad Crystallization |
| ISSN号 | 0040-6090 |
| DOI | 10.1016/j.tsf.2009.01.082 |
| 通讯作者 | Liu, fengzhen(liufz@gucas.ac.cn) |
| 英文摘要 | Vertically oriented amorphous and microcrystalline si nanorods grown on different substrates were successfully obtained by cat cvd with the glancing angle incident silane flux at low temperatures. the influences of the substrate type, substrate temperature, post treatment and hydrogen dilution on the microstructure of si nanorods were investigated. the density and diameter of nanorods are varying with the substrates. the hydrogen dilution of silane dominates the crystallization of si nanorods rather than high substrate temperature at 550 degrees c and annealing at 900 degrees c in nitrogen for 6 h. the crystallized si nanorods with crystalline volume fraction, xc, of 0.55 were achieved under a low substrate temperature of 140 degrees c. (c) 2009 elsevier b.v. all rights reserved. |
| WOS关键词 | THIN-FILMS |
| WOS研究方向 | Materials Science ; Physics |
| WOS类目 | Materials Science, Multidisciplinary ; Materials Science, Coatings & Films ; Physics, Applied ; Physics, Condensed Matter |
| 语种 | 英语 |
| WOS记录号 | WOS:000266296800021 |
| 出版者 | ELSEVIER SCIENCE SA |
| URI标识 | http://www.irgrid.ac.cn/handle/1471x/2398886 |
| 专题 | 中国科学院大学 |
| 通讯作者 | Liu, Fengzhen |
| 作者单位 | 1.Grad Univ Chinese Acad Sci, Coll Phys Sci, Beijing 100049, Peoples R China 2.Beijing Univ Aeronaut & Astronaut, Sch Mat Sci & Engn, Beijing 100083, Peoples R China |
| 推荐引用方式 GB/T 7714 | Liu, Fengzhen,Ma, Yanhong,Zhu, Meifang,et al. Silicon nanorods prepared by glancing angle catalytic chemical vapor deposition[J]. Thin solid films,2009,517(12):3492-3495. |
| APA | Liu, Fengzhen,Ma, Yanhong,Zhu, Meifang,&Yin, Penggang.(2009).Silicon nanorods prepared by glancing angle catalytic chemical vapor deposition.Thin solid films,517(12),3492-3495. |
| MLA | Liu, Fengzhen,et al."Silicon nanorods prepared by glancing angle catalytic chemical vapor deposition".Thin solid films 517.12(2009):3492-3495. |
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来源：中国科学院大学
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