Grayscale photomask fabricated by laser direct writing in metallic nano-films
文献类型：期刊论文
| 作者 | Guo, Chuan Fei1,2; Cao, Sihai1,2; Jiang, Peng1; Fang, Ying1; Zhang, Jianming1,2; Fan, Yongtao1,3; Wang, Yongsheng1,2; Xu, Wendong1,3; Zhao, Zhensheng4; Liu, Qian1 |
| 刊名 | Optics express
 |
| 出版日期 | 2009-10-26 |
| 卷号 | 17期号:22页码:19981-19987 |
| ISSN号 | 1094-4087 |
| DOI | 10.1364/oe.17.019981 |
| 通讯作者 | Guo, chuan fei() |
| 英文摘要 | The grayscale photomask plays a key role in grayscale lithography for creating 3d microstructures like micro-optical elements and mems structures, but how to fabricate grayscale masks in a cost-effective way is still a big challenge. here we present novel low cost grayscale masks created in a two-step method by laser direct writing on sn nano-films, which demonstrate continuous-tone gray levels depended on writing powers. the mechanism of the gray levels is due to the coexistence of the metal and the oxides formed in a laser-induced thermal process. the photomasks reveal good technical properties in fabricating 3d microstructures for practical applications. (c) 2009 optical society of america |
| WOS关键词 | SILICON MEMS STRUCTURES ; GRAY-SCALE LITHOGRAPHY ; THIN-FILMS ; TIN OXIDE ; SNO2 ; OXIDATION ; NANOWIRES ; JUNCTIONS ; PHASE ; GLASS |
| WOS研究方向 | Optics |
| WOS类目 | Optics |
| 语种 | 英语 |
| WOS记录号 | WOS:000271629200070 |
| 出版者 | OPTICAL SOC AMER |
| URI标识 | http://www.irgrid.ac.cn/handle/1471x/2398918 |
| 专题 | 中国科学院大学 |
| 通讯作者 | Guo, Chuan Fei |
| 作者单位 | 1.Natl Ctr Nanosci & Technol, Beijing 100190, Peoples R China 2.Chinese Acad Sci, Grad Sch, Beijing 100080, Peoples R China 3.Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, Shanghai 201800, Peoples R China 4.Chinese Acad Sci, Tech Inst Phys & Chem, Beijing 100190, Peoples R China |
| 推荐引用方式 GB/T 7714 | Guo, Chuan Fei,Cao, Sihai,Jiang, Peng,et al. Grayscale photomask fabricated by laser direct writing in metallic nano-films[J]. Optics express,2009,17(22):19981-19987. |
| APA | Guo, Chuan Fei.,Cao, Sihai.,Jiang, Peng.,Fang, Ying.,Zhang, Jianming.,...&Liu, Qian.(2009).Grayscale photomask fabricated by laser direct writing in metallic nano-films.Optics express,17(22),19981-19987. |
| MLA | Guo, Chuan Fei,et al."Grayscale photomask fabricated by laser direct writing in metallic nano-films".Optics express 17.22(2009):19981-19987. |
入库方式： iSwitch采集
来源：中国科学院大学
浏览0
下载0
收藏0
其他版本
除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。