Laser direct writing of nanoreliefs in sn nanofilms
文献类型:期刊论文
作者 | Guo, Chuan Fei1,2; Zhang, Zhuwei1,2; Cao, Sihai1,2; Liu, Qian1 |
刊名 | Optics letters
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出版日期 | 2009-09-15 |
卷号 | 34期号:18页码:2820-2822 |
ISSN号 | 0146-9592 |
通讯作者 | Liu, qian(liuq@nanoctr.cn) |
英文摘要 | High-resolution (similar to 200 nm) nanoreliefs, which possess a controllable height change (delta h, up to film thickness) and transmittance or reflectance, have been successfully fabricated in 12-nm-thick sn films by using 532 nm pulsed laser direct writing. different from current micro/nanofabrication techniques, the height change of the nanoreliefs is generated by a laser-induced-thickening process. the majority of the height change comes from a balling and coarsening effect rather than oxidation of grains. because both optical density and delta h of the nanoreliefs are almost linear to laser power, the optical images can highly resemble the topographic images. this technique is useful for fabricating complicated nanorelief structures and fine images. (c) 2009 optical society of america |
WOS关键词 | FABRICATION ; LITHOGRAPHY |
WOS研究方向 | Optics |
WOS类目 | Optics |
语种 | 英语 |
WOS记录号 | WOS:000270114800041 |
出版者 | OPTICAL SOC AMER |
URI标识 | http://www.irgrid.ac.cn/handle/1471x/2400712 |
专题 | 中国科学院大学 |
通讯作者 | Liu, Qian |
作者单位 | 1.Natl Ctr Nanosci & Technol, Beijing 100190, Peoples R China 2.Chinese Acad Sci, Grad Univ, Beijing 100080, Peoples R China |
推荐引用方式 GB/T 7714 | Guo, Chuan Fei,Zhang, Zhuwei,Cao, Sihai,et al. Laser direct writing of nanoreliefs in sn nanofilms[J]. Optics letters,2009,34(18):2820-2822. |
APA | Guo, Chuan Fei,Zhang, Zhuwei,Cao, Sihai,&Liu, Qian.(2009).Laser direct writing of nanoreliefs in sn nanofilms.Optics letters,34(18),2820-2822. |
MLA | Guo, Chuan Fei,et al."Laser direct writing of nanoreliefs in sn nanofilms".Optics letters 34.18(2009):2820-2822. |
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来源:中国科学院大学
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