中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Laser direct writing of nanoreliefs in sn nanofilms

文献类型:期刊论文

作者Guo, Chuan Fei1,2; Zhang, Zhuwei1,2; Cao, Sihai1,2; Liu, Qian1
刊名Optics letters
出版日期2009-09-15
卷号34期号:18页码:2820-2822
ISSN号0146-9592
通讯作者Liu, qian(liuq@nanoctr.cn)
英文摘要High-resolution (similar to 200 nm) nanoreliefs, which possess a controllable height change (delta h, up to film thickness) and transmittance or reflectance, have been successfully fabricated in 12-nm-thick sn films by using 532 nm pulsed laser direct writing. different from current micro/nanofabrication techniques, the height change of the nanoreliefs is generated by a laser-induced-thickening process. the majority of the height change comes from a balling and coarsening effect rather than oxidation of grains. because both optical density and delta h of the nanoreliefs are almost linear to laser power, the optical images can highly resemble the topographic images. this technique is useful for fabricating complicated nanorelief structures and fine images. (c) 2009 optical society of america
WOS关键词FABRICATION ; LITHOGRAPHY
WOS研究方向Optics
WOS类目Optics
语种英语
WOS记录号WOS:000270114800041
出版者OPTICAL SOC AMER
URI标识http://www.irgrid.ac.cn/handle/1471x/2400712
专题中国科学院大学
通讯作者Liu, Qian
作者单位1.Natl Ctr Nanosci & Technol, Beijing 100190, Peoples R China
2.Chinese Acad Sci, Grad Univ, Beijing 100080, Peoples R China
推荐引用方式
GB/T 7714
Guo, Chuan Fei,Zhang, Zhuwei,Cao, Sihai,et al. Laser direct writing of nanoreliefs in sn nanofilms[J]. Optics letters,2009,34(18):2820-2822.
APA Guo, Chuan Fei,Zhang, Zhuwei,Cao, Sihai,&Liu, Qian.(2009).Laser direct writing of nanoreliefs in sn nanofilms.Optics letters,34(18),2820-2822.
MLA Guo, Chuan Fei,et al."Laser direct writing of nanoreliefs in sn nanofilms".Optics letters 34.18(2009):2820-2822.

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来源:中国科学院大学

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