Influences of bias voltage on mechanical and tribological properties of ti-al-c films synthesized by magnetron sputtering
文献类型：期刊论文
| 作者 | Pang, Xianjuan1,2; Shi, Lei1; Wang, Peng1; Zhang, Guangan1; Liu, Weimin1 |
| 刊名 | Surface & coatings technology
 |
| 出版日期 | 2009-02-25 |
| 卷号 | 203期号:10-11页码:1537-1543 |
| 关键词 | Magnetron sputtering Ti-al-c films Mechanical properties Tribological behaviors |
| ISSN号 | 0257-8972 |
| DOI | 10.1016/j.surfcoat.2008.12.003 |
| 通讯作者 | Liu, weimin(wmliu@lzb.ac.cn) |
| 英文摘要 | Ti-al-c films were deposited on silicon (100) substrates using magnetron sputtering tial target and graphite target in argon atmosphere at various substrate negative bias voltages. the composition, surface morphology, hardness and friction coefficient of the resulting films were characterized using x-ray photoelectron spectroscope, energy dispersive spectrometry, atomic force microscopy, nanoindentation and tribological tester. results show that the structure and properties of the deposited films strongly depend on the applied substrate negative bias voltage. the ti-al-c films deposited at high substrate negative bias voltage show high surface roughness, low hardness and short wear life. in contrast, the ti-al-c films deposited without negative bias voltage exhibit uniform and smooth surface, a high hardness of approximately 37 gpa and low friction coefficient and long wear life. excellent friction and wear behaviors of the ti-al-c films deposited without negative bias may be attributed to the dense structure and high hardness. (c) 2008 published by elsevier b.v. |
| WOS关键词 | CARBON NANOCOMPOSITE FILMS ; THIN-FILMS ; LASER DEPOSITION ; TITANIUM CARBIDE ; SUBSTRATE BIAS ; COATINGS ; EVAPORATION ; SPECTRA ; STRESS ; SYSTEM |
| WOS研究方向 | Materials Science ; Physics |
| WOS类目 | Materials Science, Coatings & Films ; Physics, Applied |
| 语种 | 英语 |
| WOS记录号 | WOS:000263618600037 |
| 出版者 | ELSEVIER SCIENCE SA |
| URI标识 | http://www.irgrid.ac.cn/handle/1471x/2400897 |
| 专题 | 中国科学院大学 |
| 通讯作者 | Liu, Weimin |
| 作者单位 | 1.Chinese Acad Sci, Lanzhou Inst Chem Phys, State Key Lab Solid Lubricat, Lanzhou 730000, Peoples R China 2.Chinese Acad Sci, Grad Sch, Beijing 100039, Peoples R China |
| 推荐引用方式 GB/T 7714 | Pang, Xianjuan,Shi, Lei,Wang, Peng,et al. Influences of bias voltage on mechanical and tribological properties of ti-al-c films synthesized by magnetron sputtering[J]. Surface & coatings technology,2009,203(10-11):1537-1543. |
| APA | Pang, Xianjuan,Shi, Lei,Wang, Peng,Zhang, Guangan,&Liu, Weimin.(2009).Influences of bias voltage on mechanical and tribological properties of ti-al-c films synthesized by magnetron sputtering.Surface & coatings technology,203(10-11),1537-1543. |
| MLA | Pang, Xianjuan,et al."Influences of bias voltage on mechanical and tribological properties of ti-al-c films synthesized by magnetron sputtering".Surface & coatings technology 203.10-11(2009):1537-1543. |
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来源：中国科学院大学
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