A comparative study of the influence of different post-treatment methods on the properties of hfo2 single layers
文献类型：期刊论文
| 作者 | Wang, Congjuan1,2; Jin, Yunxia1; Zhang, Dongping3; Shao, Jianda1; Fan, Zhengxiu1 |
| 刊名 | Optics and laser technology
 |
| 出版日期 | 2009-07-01 |
| 卷号 | 41期号:5页码:570-573 |
| 关键词 | Heat treatment Laser conditioning Ion post-treatment |
| ISSN号 | 0030-3992 |
| DOI | 10.1016/j.optlastec.2008.10.013 |
| 通讯作者 | Wang, congjuan(leeloocong@mail.siom.ac.cn) |
| 英文摘要 | Heat treatment, laser conditioning and ion post-treatment were used, respectively, on hfo2 single layers deposited by electron beam evaporation (ebe). optical, structural and laser-induced damage threshold (lidt) properties of the films had been studied. it was found that all of the post-treatment methods are effective for improving the lidt, but the mechanism for the improvement differs. heat treatment in atmosphere was found to be effective for improving film stoichiometry. laser conditioning was useful to decrease the defects by stress release. while in the ion post-treatment, the defects were removed by ion sputtering and the absorption was reduced at the effect of compression induced by ion bombardment. the most suitable method should be chosen for the required characteristics of the coatings. (c) 2008 elsevier ltd. all rights reserved. |
| WOS关键词 | ELECTRON-BEAM EVAPORATION ; THIN-FILMS ; HAFNIUM OXIDE ; SURFACE-ROUGHNESS ; DAMAGE THRESHOLD ; ZRO2 |
| WOS研究方向 | Optics ; Physics |
| WOS类目 | Optics ; Physics, Applied |
| 语种 | 英语 |
| WOS记录号 | WOS:000266000900010 |
| 出版者 | ELSEVIER SCI LTD |
| URI标识 | http://www.irgrid.ac.cn/handle/1471x/2404052 |
| 专题 | 中国科学院大学 |
| 通讯作者 | Wang, Congjuan |
| 作者单位 | 1.Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, Shanghai 201800, Peoples R China 2.Chinese Acad Sci, Grad Sch, Beijing 100039, Peoples R China 3.Shenzhen Univ, Dept Appl Phys, Sch Sci, Shenzhen 518060, Peoples R China |
| 推荐引用方式 GB/T 7714 | Wang, Congjuan,Jin, Yunxia,Zhang, Dongping,et al. A comparative study of the influence of different post-treatment methods on the properties of hfo2 single layers[J]. Optics and laser technology,2009,41(5):570-573. |
| APA | Wang, Congjuan,Jin, Yunxia,Zhang, Dongping,Shao, Jianda,&Fan, Zhengxiu.(2009).A comparative study of the influence of different post-treatment methods on the properties of hfo2 single layers.Optics and laser technology,41(5),570-573. |
| MLA | Wang, Congjuan,et al."A comparative study of the influence of different post-treatment methods on the properties of hfo2 single layers".Optics and laser technology 41.5(2009):570-573. |
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来源：中国科学院大学
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