Pattern structures fabricated on zns-sio2/agox/zns-sio2 thin film structure by laser direct writing technology
文献类型：期刊论文
| 作者 | Dun, Aihuan1,2; Wei, Jingsong1; Gan, Fuxi1 |
| 刊名 | Applied physics a-materials science & processing
 |
| 出版日期 | 2010-08-01 |
| 卷号 | 100期号:2页码:401-407 |
| ISSN号 | 0947-8396 |
| DOI | 10.1007/s00339-010-5852-4 |
| 通讯作者 | Wei, jingsong(weijingsong@siom.ac.cn) |
| 英文摘要 | In this work, we used the multilayered zns-sio2/ago (x) /zns-sio2 films as the laser direct writing materials, and pattern structures with different shapes and sizes were directly written with green laser (lambda=488 nm). compared with traditional photoresist materials, the pattern structures can be directly formed in this film structures without developing and etching procedures and also can be directly written by very low laser power. by tuning the laser parameters precisely, pattern structures with different sizes and shapes could be obtained as well. the analysis indicates that the formation mechanism of the pattern structure is mainly due to the volume expansion caused by ago (x) decomposition into silver particles and oxygen. the oxygen applies pressure to the zns-sio2 layer and makes a hollow shell under the film. the aspect ratios of the patterns rapidly increase from the minimum of 0.012 in laser power of 3.0 mw to the maximum of 0.201 in laser power of 5.0 mw. the thermal stability of the patterns was also qualitatively studied. |
| WOS关键词 | NEAR-FIELD STRUCTURE ; SUBWAVELENGTH STRUCTURE ; SILVER-OXIDE ; AGOX ; NANOSTRUCTURES ; LITHOGRAPHY ; DISK |
| WOS研究方向 | Materials Science ; Physics |
| WOS类目 | Materials Science, Multidisciplinary ; Physics, Applied |
| 语种 | 英语 |
| WOS记录号 | WOS:000280556600014 |
| 出版者 | SPRINGER |
| URI标识 | http://www.irgrid.ac.cn/handle/1471x/2408896 |
| 专题 | 中国科学院大学 |
| 通讯作者 | Wei, Jingsong |
| 作者单位 | 1.Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, Shanghai 201800, Peoples R China 2.Chinese Acad Sci, Grad Sch, Beijing 100039, Peoples R China |
| 推荐引用方式 GB/T 7714 | Dun, Aihuan,Wei, Jingsong,Gan, Fuxi. Pattern structures fabricated on zns-sio2/agox/zns-sio2 thin film structure by laser direct writing technology[J]. Applied physics a-materials science & processing,2010,100(2):401-407. |
| APA | Dun, Aihuan,Wei, Jingsong,&Gan, Fuxi.(2010).Pattern structures fabricated on zns-sio2/agox/zns-sio2 thin film structure by laser direct writing technology.Applied physics a-materials science & processing,100(2),401-407. |
| MLA | Dun, Aihuan,et al."Pattern structures fabricated on zns-sio2/agox/zns-sio2 thin film structure by laser direct writing technology".Applied physics a-materials science & processing 100.2(2010):401-407. |
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来源：中国科学院大学
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