Effect of bias voltage on microstructure and properties of ti-doped graphite-like carbon films synthesized by magnetron sputtering
文献类型:期刊论文
作者 | Wang, Yongxin1,3; Wang, Liping1,2; Zhang, Guangan1; Wang, S. C.2; Wood, R. J. K.2; Xue, Qunji1 |
刊名 | Surface & coatings technology
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出版日期 | 2010-10-25 |
卷号 | 205期号:3页码:793-800 |
关键词 | Graphite-like carbon (glc) film Bias voltage Microstructure Water environment Tribological property |
ISSN号 | 0257-8972 |
DOI | 10.1016/j.surfcoat.2010.07.112 |
通讯作者 | Wang, liping(lpwang@licp.cas.cn) |
英文摘要 | Ti-doped graphite-like carbon (glc) films with different microstructures and compositions were fabricated using magnetron sputtering technique. the influence of bias voltages on microstructure, hardness, internal stress, adhesion strength and tribological properties of the as-deposited glc films were systemically investigated. the results showed that with increasing bias voltage, the graphite-like structure component (sp(2) bond) in the glc films increased, and the films gradually became much smoother and denser. the nanohardness and compressive internal stress increased significantly with the increase of bias voltage up to -300 v and were constant after -400 v. glc films deposited with bias voltages in the range of -300--400 v exhibited optimum adhesion strength with the substrates. both the friction coefficients and the wear rates of glc films in ambient air and water decreased with increasing voltages in the lower bias range (0--300 v), however, they were constant for higher bias values (beyond -300 v). in addition, the wear rate of glc films under water-lubricated condition was significantly higher for voltages below -300 v but lower at high voltage than that under dry friction condition. the excellent tribological performance of ti-doped glc films prepared at higher bias voltages of -300--400 v are attributed to their high hardness, tribo-induced lubricating top-layers and planar (2d) graphite-like structure. crown copyright (c) 2010 published by elsevier b.v. all rights reserved. |
WOS关键词 | DIAMOND-LIKE-CARBON ; CATHODIC VACUUM-ARC ; TRIBOLOGICAL PROPERTIES ; AMORPHOUS-CARBON ; DLC FILMS ; WATER ENVIRONMENT ; A-C ; MECHANICAL-PROPERTIES ; COATINGS ; BEHAVIOR |
WOS研究方向 | Materials Science ; Physics |
WOS类目 | Materials Science, Coatings & Films ; Physics, Applied |
语种 | 英语 |
WOS记录号 | WOS:000282997400014 |
出版者 | ELSEVIER SCIENCE SA |
URI标识 | http://www.irgrid.ac.cn/handle/1471x/2408905 |
专题 | 中国科学院大学 |
通讯作者 | Wang, Liping |
作者单位 | 1.Chinese Acad Sci, Lanzhou Inst Chem Phys, State Key Lab Solid Lubricat, Lanzhou 730000, Peoples R China 2.Univ Southampton, Sch Engn Sci, NCATS, Southampton SO17 1BJ, Hants, England 3.Grad Univ Chinese Acad Sci, Beijing 100039, Peoples R China |
推荐引用方式 GB/T 7714 | Wang, Yongxin,Wang, Liping,Zhang, Guangan,et al. Effect of bias voltage on microstructure and properties of ti-doped graphite-like carbon films synthesized by magnetron sputtering[J]. Surface & coatings technology,2010,205(3):793-800. |
APA | Wang, Yongxin,Wang, Liping,Zhang, Guangan,Wang, S. C.,Wood, R. J. K.,&Xue, Qunji.(2010).Effect of bias voltage on microstructure and properties of ti-doped graphite-like carbon films synthesized by magnetron sputtering.Surface & coatings technology,205(3),793-800. |
MLA | Wang, Yongxin,et al."Effect of bias voltage on microstructure and properties of ti-doped graphite-like carbon films synthesized by magnetron sputtering".Surface & coatings technology 205.3(2010):793-800. |
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来源:中国科学院大学
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