Structure and characteristics of amorphous (ti,si)-c:h films deposited by reactive magnetron sputtering
文献类型：期刊论文
| 作者 | Jiang, Jinlong1,2,3; Hao, Junying1; Pang, Xianjuan1,2; Wang, Peng1; Liu, Weimin1 |
| 刊名 | Diamond and related materials
 |
| 出版日期 | 2010-10-01 |
| 卷号 | 19期号:10页码:1172-1177 |
| 关键词 | Amorphous hydrogenated carbon Doping Microstructure Superlow friction |
| ISSN号 | 0925-9635 |
| DOI | 10.1016/j.diamond.2010.05.005 |
| 通讯作者 | Liu, weimin(wmliu@lzb.ac.cn) |
| 英文摘要 | The hydrogenated amorphous carbon films doped with ti and si ((ti,si)-c:h) were deposited on silicon substrates using reactive magnetron sputtering ti(80)si(20) composite target in an argon and methane gas mixture. the structures of the films were analyzed by x-ray photoelectron spectroscopy and visible raman spectroscopy. the morphologies were observed by atomic force microscope. the friction coefficients of the films were tested on the ball-on-disc tribometer. the results indicate that the sp(3)/sp(2) ratios in the films can be varied from 0.18 to 0.63 by changing ti and si contents at various ch(4) flow rates. the surface of the films becomes smoother and more compact as the ch4 flow rate increases. the lowest friction coefficient is as low as 0.0139 for the film with ti of 4.5 at.% and si of 1.0 at.%. especially, the film exhibits a superlow value (mu<0.01) under ambient air with 40% relative humidity in friction process. the superlow friction coefficient in ambient air may be, attributable to synergistic effects of a combination of ti and si in the film. crown copyright (c) 2010 published by elsevier b.v. all rights reserved. |
| WOS关键词 | DIAMOND-LIKE CARBON ; H THIN-FILMS ; TRIBOLOGICAL BEHAVIOR ; DLC FILMS ; COATINGS ; NANOCOMPOSITE ; MICROSTRUCTURE ; SPECTRA ; STRESS ; RAMAN |
| WOS研究方向 | Materials Science |
| WOS类目 | Materials Science, Multidisciplinary |
| 语种 | 英语 |
| WOS记录号 | WOS:000282203300008 |
| 出版者 | ELSEVIER SCIENCE SA |
| URI标识 | http://www.irgrid.ac.cn/handle/1471x/2412383 |
| 专题 | 中国科学院大学 |
| 通讯作者 | Liu, Weimin |
| 作者单位 | 1.Chinese Acad Sci, State Key Lab Solid Lubricat, Lanzhou Inst Chem Phys, Lanzhou 730000, Peoples R China 2.Lanzhou Univ Technol, Dept Phys, Lanzhou 730050, Peoples R China 3.Chinese Acad Sci, Grad Univ, Beijing 100049, Peoples R China |
| 推荐引用方式 GB/T 7714 | Jiang, Jinlong,Hao, Junying,Pang, Xianjuan,et al. Structure and characteristics of amorphous (ti,si)-c:h films deposited by reactive magnetron sputtering[J]. Diamond and related materials,2010,19(10):1172-1177. |
| APA | Jiang, Jinlong,Hao, Junying,Pang, Xianjuan,Wang, Peng,&Liu, Weimin.(2010).Structure and characteristics of amorphous (ti,si)-c:h films deposited by reactive magnetron sputtering.Diamond and related materials,19(10),1172-1177. |
| MLA | Jiang, Jinlong,et al."Structure and characteristics of amorphous (ti,si)-c:h films deposited by reactive magnetron sputtering".Diamond and related materials 19.10(2010):1172-1177. |
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来源：中国科学院大学
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