A facile method to improve tribological properties of silicon surface by combining nanogrooves patterning and thin film lubrication
文献类型：期刊论文
| 作者 | Wang, Ying1,2,3; Wang, Liping1; Xue, Qunji1; Yuan, Ningyi2; Ding, Jianning2 |
| 刊名 | Colloids and surfaces a-physicochemical and engineering aspects
 |
| 出版日期 | 2010-12-03 |
| 卷号 | 372期号:1-3页码:139-145 |
| 关键词 | Macs Texture Nanofriction Microfriction |
| ISSN号 | 0927-7757 |
| DOI | 10.1016/j.colsurfa.2010.10.020 |
| 通讯作者 | Wang, liping(lpwang@licp.cas.cn) |
| 英文摘要 | Surface micro/nanohierarchical structure designing and thin film lubrication are two main methods to alleviate adhesive and frictional problems encountered by micro/nanoelectromechanical systems (mems/nems). in this study, silicon surfaces with micro/nano grooves were prepared by photolithography and further chemically modified by multiply-alkylated cyclopentane (mac) thin films to improve the tribological behaviors of mems/nems. the effects of nanoscaled roughness (including groove pitch and groove fractional surface coverage) and chemical modification on the wetting and tribological properties of surfaces were systemically investigated. the results of contact angle measurement indicated that the surface hydrophilicity decreases with increasing of surface roughness and lowering of the surface energy (chemical treatment with macs). tribological study showed that with the increasing of nanoscale roughness and combined with chemical modification, the tribological properties are greatly improved, which may be affected by real area of contact and the surface chemistry. (c) 2010 elsevier b.v. all rights reserved. |
| WOS关键词 | SELF-ASSEMBLED MONOLAYERS ; FORCE/FRICTION FORCE MICROSCOPE ; ALKYLATED CYCLOPENTANES MACS ; FRICTION ; ADHESION ; POLYMERS ; MEMS ; AFM ; WETTABILITY ; PERFORMANCE |
| WOS研究方向 | Chemistry |
| WOS类目 | Chemistry, Physical |
| 语种 | 英语 |
| WOS记录号 | WOS:000285662500022 |
| 出版者 | ELSEVIER SCIENCE BV |
| URI标识 | http://www.irgrid.ac.cn/handle/1471x/2415188 |
| 专题 | 中国科学院大学 |
| 通讯作者 | Wang, Liping |
| 作者单位 | 1.Chinese Acad Sci, Lanzhou Inst Chem Phys, State Kay Lab Solid Lubricat, Lanzhou 730000, Peoples R China 2.Changzhou Univ, Ctr Low Dimens Mat Micro Nano Device & Syst, Changzhou 213164, Peoples R China 3.Chinese Acad Sci, Grad Sch, Beijing 100039, Peoples R China |
| 推荐引用方式 GB/T 7714 | Wang, Ying,Wang, Liping,Xue, Qunji,et al. A facile method to improve tribological properties of silicon surface by combining nanogrooves patterning and thin film lubrication[J]. Colloids and surfaces a-physicochemical and engineering aspects,2010,372(1-3):139-145. |
| APA | Wang, Ying,Wang, Liping,Xue, Qunji,Yuan, Ningyi,&Ding, Jianning.(2010).A facile method to improve tribological properties of silicon surface by combining nanogrooves patterning and thin film lubrication.Colloids and surfaces a-physicochemical and engineering aspects,372(1-3),139-145. |
| MLA | Wang, Ying,et al."A facile method to improve tribological properties of silicon surface by combining nanogrooves patterning and thin film lubrication".Colloids and surfaces a-physicochemical and engineering aspects 372.1-3(2010):139-145. |
入库方式： iSwitch采集
来源：中国科学院大学
浏览0
下载0
收藏0
其他版本
除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。