Fabrication of 1.55-mu m si-based resonant cavity enhanced photodetectors using sol-gel bonding
文献类型：期刊论文
| 作者 | Mao, RW; Li, CB; Zuo, YH; Cheng, BW; Teng, XG; Luo, LP; Yu, JZ; Wang, QM |
| 刊名 | Ieee photonics technology letters
 |
| 出版日期 | 2004-08-01 |
| 卷号 | 16期号:8页码:1930-1932 |
| 关键词 | Bonding medium Direct bonding Photodetector Resonant cavity enhanced (rce) |
| ISSN号 | 1041-1135 |
| DOI | 10.1109/lpt.2004.831049 |
| 通讯作者 | Mao, rw(maorongwei@red.semi.ac.cn) |
| 英文摘要 | In this work, a novel bonding method using silicate gel as the bonding medium was developed to fabricate an ingaas narrow-band response resonant cavity enhanced photodetector on a silicon substrate. the bonding was performed at a low temperature of 350 degreesc without any special treatment on bonding surfaces and a si-based narrow-band response ingaas photodetector was successfully fabricated, with a quantum efficiency of 34.4% at the resonance wavelength of 1.54 mum, and a full-width at half-maximum of about 27 nm. the photodetector has a linear photoresponse up to 4-mw optical power under 1.5 v or higher reverse bias. the low temperature wafer bonding process demonstrates a great potential in device fabrication. |
| WOS关键词 | QUANTUM-EFFICIENCY ; OPTIMIZATION ; PHOTODIODES ; DESIGN |
| WOS研究方向 | Engineering ; Optics ; Physics |
| WOS类目 | Engineering, Electrical & Electronic ; Optics ; Physics, Applied |
| 语种 | 英语 |
| WOS记录号 | WOS:000222884300046 |
| 出版者 | IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC |
| URI标识 | http://www.irgrid.ac.cn/handle/1471x/2426192 |
| 专题 | 半导体研究所 |
| 通讯作者 | Mao, RW |
| 作者单位 | Chinese Acad Sci, Inst Semicond, Beijing 100083, Peoples R China |
| 推荐引用方式 GB/T 7714 | Mao, RW,Li, CB,Zuo, YH,et al. Fabrication of 1.55-mu m si-based resonant cavity enhanced photodetectors using sol-gel bonding[J]. Ieee photonics technology letters,2004,16(8):1930-1932. |
| APA | Mao, RW.,Li, CB.,Zuo, YH.,Cheng, BW.,Teng, XG.,...&Wang, QM.(2004).Fabrication of 1.55-mu m si-based resonant cavity enhanced photodetectors using sol-gel bonding.Ieee photonics technology letters,16(8),1930-1932. |
| MLA | Mao, RW,et al."Fabrication of 1.55-mu m si-based resonant cavity enhanced photodetectors using sol-gel bonding".Ieee photonics technology letters 16.8(2004):1930-1932. |
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来源：半导体研究所
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