中国科学院机构知识库网格
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Thermal annealing effect on inas/ingaas quantum dots grown by atomic layer molecular beam epitaxy

文献类型:期刊论文

作者Shi, GX; Jin, P; Xu, B; Li, CM; Cui, CX; Wang, YL; Ye, XL; Wu, J; Wang, ZG
刊名Journal of crystal growth
出版日期2004-09-01
卷号269期号:2-4页码:181-186
关键词Photoluminescence Molecular beam epitaxy Quantum dots Semiconductor iii-v material Laser device
ISSN号0022-0248
DOI10.1016/j.jcrysgro.2004.05.058
通讯作者Shi, gx(gxshi@red.semi.ac.cn)
英文摘要The effect of rapid thermal annealing on the inas quantum dots (qds) grown by atomic layer molecular beam epitaxy and capped with ingaas layer has been investigated using transmission electron microscopy and photoluminescence (pl). different from the previously reported results, no obvious blueshift of the pl emission of qds is observed until the annealing temperature increases up to 800 degreesc. the size and shape of the qds annealed at 750 degreesc have hardly changed indicating the relatively weak ga/in interdiffusion, which is characterized by little blueshift of the pl peak of qds. the qd size increases largely and a few large clusters can be observed after 800 degreesc rta, implying the fast interdiffusion and the formation of ingaas qds. these results indicate that the delay of the blueshift of the pl peak of qds is correlated with the abnormal interdiffusion process, which can be explained by two possible reasons: the reduction of excess-as-induced defects and the redistribution of in, ga atoms around the inas qds resulted from the sub-monolayer deposition of ingaas capping layer. (c) 2004 elsevier b.v. all rights reserved.
WOS关键词MIGRATION-ENHANCED EPITAXY ; GAAS
WOS研究方向Crystallography ; Materials Science ; Physics
WOS类目Crystallography ; Materials Science, Multidisciplinary ; Physics, Applied
语种英语
WOS记录号WOS:000223813300001
出版者ELSEVIER SCIENCE BV
URI标识http://www.irgrid.ac.cn/handle/1471x/2426195
专题半导体研究所
通讯作者Shi, GX
作者单位Chinese Acad Sci, Inst Semicond, Key Lab Semicond Mat Sci, Beijing 100083, Peoples R China
推荐引用方式
GB/T 7714
Shi, GX,Jin, P,Xu, B,et al. Thermal annealing effect on inas/ingaas quantum dots grown by atomic layer molecular beam epitaxy[J]. Journal of crystal growth,2004,269(2-4):181-186.
APA Shi, GX.,Jin, P.,Xu, B.,Li, CM.,Cui, CX.,...&Wang, ZG.(2004).Thermal annealing effect on inas/ingaas quantum dots grown by atomic layer molecular beam epitaxy.Journal of crystal growth,269(2-4),181-186.
MLA Shi, GX,et al."Thermal annealing effect on inas/ingaas quantum dots grown by atomic layer molecular beam epitaxy".Journal of crystal growth 269.2-4(2004):181-186.

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来源:半导体研究所

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