Structural and optical properties of quaternary alingan epilayers grown by mocvd with various tmga flows
文献类型：期刊论文
| 作者 | Liu, JP; Zhang, BS; Wu, M; Li, DB; Zhang, JC; Jin, RQ; Zhu, JJ; Chen, J; Wang, JF; Wang, YT |
| 刊名 | Journal of crystal growth
 |
| 出版日期 | 2004-01-09 |
| 卷号 | 260期号:3-4页码:388-393 |
| 关键词 | Triple-axis x-ray diffraction Atomic force microscopy Metalorganic chemical vapor deposition Alingan quaternary alloys |
| ISSN号 | 0022-0248 |
| DOI | 10.1016/j.jcrysgro.2003.09.007 |
| 通讯作者 | Liu, jp() |
| 英文摘要 | Alingan quaternary epilayers have been grown with various tmga flows by metalorganic chemical vapor deposition to investigate the influence of growth rate on the structural and optical properties. triple-axis x-ray diffraction measurements show alingan epilayers have good crystalline quality. photolummescence (pl) measurements show that the emission intensity of alingan epilayers is twenty times stronger than that of algan epilayer with comparable al content. v-shaped pits are observed at the surface of alingan epilayers by atomic force microscopy (afm) and transmission electron microscopy (tem). high growth rate leads to increased density and size of v-shaped pits, but crystalline quality is not degraded. (c) 2003 elsevier b.v. all rights reserved. |
| WOS关键词 | MULTIPLE-QUANTUM WELLS ; ENHANCED LUMINESCENCE ; INXALYGA1-X-YN ; INGAN/GAN ; QUALITY |
| WOS研究方向 | Crystallography ; Materials Science ; Physics |
| WOS类目 | Crystallography ; Materials Science, Multidisciplinary ; Physics, Applied |
| 语种 | 英语 |
| WOS记录号 | WOS:000187781300017 |
| 出版者 | ELSEVIER SCIENCE BV |
| URI标识 | http://www.irgrid.ac.cn/handle/1471x/2426247 |
| 专题 | 半导体研究所 |
| 通讯作者 | Liu, JP |
| 作者单位 | 1.Chinese Acad Sci, Inst Semicond, State Key Lab Integrated Optoelect, Beijing 100083, Peoples R China 2.Chinese Acad Sci, Inst Semicond, Key Lab Semicond Mat, Beijing 100083, Peoples R China |
| 推荐引用方式 GB/T 7714 | Liu, JP,Zhang, BS,Wu, M,et al. Structural and optical properties of quaternary alingan epilayers grown by mocvd with various tmga flows[J]. Journal of crystal growth,2004,260(3-4):388-393. |
| APA | Liu, JP.,Zhang, BS.,Wu, M.,Li, DB.,Zhang, JC.,...&Yang, H.(2004).Structural and optical properties of quaternary alingan epilayers grown by mocvd with various tmga flows.Journal of crystal growth,260(3-4),388-393. |
| MLA | Liu, JP,et al."Structural and optical properties of quaternary alingan epilayers grown by mocvd with various tmga flows".Journal of crystal growth 260.3-4(2004):388-393. |
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来源：半导体研究所
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