Study on the perfection of in situ p-injection synthesis lec-inp single crystals
文献类型：期刊论文
| 作者 | Zhou, XL; Zhao, YW; Sun, NF; Yang, GY; Xu, YQ; Sun, TN |
| 刊名 | Journal of crystal growth
 |
| 出版日期 | 2004-03-15 |
| 卷号 | 264期号:1-3页码:17-20 |
| 关键词 | Etch-pit density Phosphorus-rich Pl-mapping Indium phosphide |
| ISSN号 | 0022-0248 |
| DOI | 10.1016/j.jcrysgro.2003.12.042 |
| 通讯作者 | Zhou, xl(tnsun@heinfo.net) |
| 英文摘要 | Undoped, s-doped and fe-doped inp crystals with diameter up to 4-inch have been pulled in drop 10 0 drop -direction under p-rich condition by a rapid p-injection in situ synthesis liquid encapsulated czochralski (lec) method. high speed photoluminescence mapping, etch-pit density (epd) mapping and scanning electron microscopy have been used to characterize the samples of the single crystal ingots. dislocations and electrical homogeneity of these samples are investigated and compared. by controlling the thermal field and the solid-liquid interface shape, 4-inch low-epd inp single crystals have been successfully grown by the rapid p-injection synthesis lec method. the epd across the wafer of the ingots is less than 5 x 10(4) cm(-2). cluster defects with a pore center are observed in the p-rich lec grown inp ingots. these defects are distributed irregularly on a wafer and are surrounded by a high concentration of dislocations. the uniformity of the pl intensity across the wafer is influenced by these defects. (c) 2004 elsevier b.v. all rights reserved. |
| WOS关键词 | GROWTH |
| WOS研究方向 | Crystallography ; Materials Science ; Physics |
| WOS类目 | Crystallography ; Materials Science, Multidisciplinary ; Physics, Applied |
| 语种 | 英语 |
| WOS记录号 | WOS:000220345400004 |
| 出版者 | ELSEVIER SCIENCE BV |
| URI标识 | http://www.irgrid.ac.cn/handle/1471x/2426250 |
| 专题 | 半导体研究所 |
| 通讯作者 | Zhou, XL |
| 作者单位 | 1.Hebei Semicond Res Inst, Hebei 050051, Peoples R China 2.Chinese Acad Sci, Inst Semicond, Ctr Mat Sci, Beijing 100083, Peoples R China |
| 推荐引用方式 GB/T 7714 | Zhou, XL,Zhao, YW,Sun, NF,et al. Study on the perfection of in situ p-injection synthesis lec-inp single crystals[J]. Journal of crystal growth,2004,264(1-3):17-20. |
| APA | Zhou, XL,Zhao, YW,Sun, NF,Yang, GY,Xu, YQ,&Sun, TN.(2004).Study on the perfection of in situ p-injection synthesis lec-inp single crystals.Journal of crystal growth,264(1-3),17-20. |
| MLA | Zhou, XL,et al."Study on the perfection of in situ p-injection synthesis lec-inp single crystals".Journal of crystal growth 264.1-3(2004):17-20. |
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来源：半导体研究所
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