A method to estimate the strain state of sige/si by measuring the bandgap
文献类型:期刊论文
作者 | Cheng, BW; Yao, F; Xue, CL; Zhang, JG; Li, CB; Mao, RW; Zuo, YH; Luo, LP; Wang, QM |
刊名 | Acta physica sinica
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出版日期 | 2005-09-01 |
卷号 | 54期号:9页码:4350-4353 |
关键词 | Sige alloy Strain Bandgap |
ISSN号 | 1000-3290 |
通讯作者 | Cheng, bw() |
英文摘要 | Sing the result of model-solid theory, we have obtained the relationship between bandgap and strain of si1-x ge-x alloy on si (100) substrate with x < 0.85. it was shown that the deviation between the bandgap of strained sige and relaxed sige is proportional to the strain. according to the theoretical result, a novel method was suggested to determine the strain state of sige/ si through measuring the bandgap. the strain in the sige/si multi-quantum wells was measured using the new method and the results had good agreement with that from xrd measurement. |
WOS关键词 | LAYERS |
WOS研究方向 | Physics |
WOS类目 | Physics, Multidisciplinary |
语种 | 英语 |
WOS记录号 | WOS:000231569500070 |
出版者 | CHINESE PHYSICAL SOC |
URI标识 | http://www.irgrid.ac.cn/handle/1471x/2426268 |
专题 | 半导体研究所 |
通讯作者 | Cheng, BW |
作者单位 | Chinese Acad Sci, Inst Semicond, Beijing 100083, Peoples R China |
推荐引用方式 GB/T 7714 | Cheng, BW,Yao, F,Xue, CL,et al. A method to estimate the strain state of sige/si by measuring the bandgap[J]. Acta physica sinica,2005,54(9):4350-4353. |
APA | Cheng, BW.,Yao, F.,Xue, CL.,Zhang, JG.,Li, CB.,...&Wang, QM.(2005).A method to estimate the strain state of sige/si by measuring the bandgap.Acta physica sinica,54(9),4350-4353. |
MLA | Cheng, BW,et al."A method to estimate the strain state of sige/si by measuring the bandgap".Acta physica sinica 54.9(2005):4350-4353. |
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来源:半导体研究所
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