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Chinese Academy of Sciences Institutional Repositories Grid
A method to estimate the strain state of sige/si by measuring the bandgap

文献类型:期刊论文

作者Cheng, BW; Yao, F; Xue, CL; Zhang, JG; Li, CB; Mao, RW; Zuo, YH; Luo, LP; Wang, QM
刊名Acta physica sinica
出版日期2005-09-01
卷号54期号:9页码:4350-4353
关键词Sige alloy Strain Bandgap
ISSN号1000-3290
通讯作者Cheng, bw()
英文摘要Sing the result of model-solid theory, we have obtained the relationship between bandgap and strain of si1-x ge-x alloy on si (100) substrate with x < 0.85. it was shown that the deviation between the bandgap of strained sige and relaxed sige is proportional to the strain. according to the theoretical result, a novel method was suggested to determine the strain state of sige/ si through measuring the bandgap. the strain in the sige/si multi-quantum wells was measured using the new method and the results had good agreement with that from xrd measurement.
WOS关键词LAYERS
WOS研究方向Physics
WOS类目Physics, Multidisciplinary
语种英语
WOS记录号WOS:000231569500070
出版者CHINESE PHYSICAL SOC
URI标识http://www.irgrid.ac.cn/handle/1471x/2426268
专题半导体研究所
通讯作者Cheng, BW
作者单位Chinese Acad Sci, Inst Semicond, Beijing 100083, Peoples R China
推荐引用方式
GB/T 7714
Cheng, BW,Yao, F,Xue, CL,et al. A method to estimate the strain state of sige/si by measuring the bandgap[J]. Acta physica sinica,2005,54(9):4350-4353.
APA Cheng, BW.,Yao, F.,Xue, CL.,Zhang, JG.,Li, CB.,...&Wang, QM.(2005).A method to estimate the strain state of sige/si by measuring the bandgap.Acta physica sinica,54(9),4350-4353.
MLA Cheng, BW,et al."A method to estimate the strain state of sige/si by measuring the bandgap".Acta physica sinica 54.9(2005):4350-4353.

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来源:半导体研究所

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