Demonstration of low-cost si-based tunable long-wavelength resonant-cavity-enhanced photodetectors
文献类型：期刊论文
| 作者 | Mao, RW; Zuo, YH; Li, CB; Cheng, BW; Teng, XG; Luo, LP; Yu, JZ; Wang, QM |
| 刊名 | Applied physics letters
 |
| 出版日期 | 2005-01-17 |
| 卷号 | 86期号:3页码:3 |
| ISSN号 | 0003-6951 |
| DOI | 10.1063/1.1852712 |
| 通讯作者 | Mao, rw(maorongwei@red.semi.ac.cn) |
| 英文摘要 | A simple process for fabricating low-cost si-based continuously tunable long-wavelength resonant-cavity-enhanced (rce) photodetectors has been investigated. high-contrast sio2/si(deltan similar to2) was employed as mirrors to eliminate the need to grow thick epitaxial distributed bragg reflectors. such high-reflectivity sio2/si mirrors were deposited on the as-grown ingaas epitaxy layers, and then were bonded to silicon substrates at a low temperature of 350 c without any special treatment on bonding surfaces, employing silicate gel as the bonding medium. the cost is thus decreased. a thermally tunable si-based ingaas rce photodetector operating at 1.3-1.6 mum was obtained, with a quantum efficiency of about 44% at the resonant wavelength of 1476 nm and a tuning range of 14.5 nm. it demonstrates a great potential for industry processes. (c) 2005 american institute of physics. |
| WOS关键词 | QUANTUM-EFFICIENCY ; PHOTODIODES ; FABRICATION ; BANDWIDTH ; DESIGN ; FILTER ; RANGE |
| WOS研究方向 | Physics |
| WOS类目 | Physics, Applied |
| 语种 | 英语 |
| WOS记录号 | WOS:000226864600081 |
| 出版者 | AMER INST PHYSICS |
| URI标识 | http://www.irgrid.ac.cn/handle/1471x/2426293 |
| 专题 | 半导体研究所 |
| 通讯作者 | Mao, RW |
| 作者单位 | Chinese Acad Sci, Inst Semicond, State Key Joint Lab Integrated Optoelect, Beijing 100083, Peoples R China |
| 推荐引用方式 GB/T 7714 | Mao, RW,Zuo, YH,Li, CB,et al. Demonstration of low-cost si-based tunable long-wavelength resonant-cavity-enhanced photodetectors[J]. Applied physics letters,2005,86(3):3. |
| APA | Mao, RW.,Zuo, YH.,Li, CB.,Cheng, BW.,Teng, XG.,...&Wang, QM.(2005).Demonstration of low-cost si-based tunable long-wavelength resonant-cavity-enhanced photodetectors.Applied physics letters,86(3),3. |
| MLA | Mao, RW,et al."Demonstration of low-cost si-based tunable long-wavelength resonant-cavity-enhanced photodetectors".Applied physics letters 86.3(2005):3. |
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来源：半导体研究所
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