Integrated folding 4x4 optical matrix switch with total internal reflection mirrors on soi by anisotropic chemical etching
文献类型：期刊论文
| 作者 | Liu, JW; Yu, JZ; Chen, SW; Li, ZY |
| 刊名 | Ieee photonics technology letters
 |
| 出版日期 | 2005-06-01 |
| 卷号 | 17期号:6页码:1187-1189 |
| 关键词 | Optical switch Silicon-on-insulator (soi) Total internal reflection (tir) mirror Wet chemical etching |
| ISSN号 | 1041-1135 |
| DOI | 10.1109/lpt.2005.846609 |
| 通讯作者 | Liu, jw(jwliu@red.semi.ac.cn) |
| 英文摘要 | A folding rearrangeable nonblocking 4 x 4 optical matrix switch was designed and fabricated on silicon-on-insulator wafer. to compress chip size, switch elements (ses) were interconnected by total internal reflection (tir) mirrors instead of conventional s-bends. for obtaining smooth interfaces, potassium hydroxide anisotropic chemical etching of silicon was utilized to make the matrix switch for the first time. the device has a compact size of 20 x 1.6 mm(2) and a fast response of 7.5 mu s. the power consumption of each 2 x 2 se and the average excess loss per mirror were 145 mw and -1.1 db, respectively. low path dependence of +/- 0.7 db in total excess loss was obtained because of the symmetry of propagation paths in this novel matrix switch. |
| WOS关键词 | SILICON-ON-INSULATOR ; COUPLERS |
| WOS研究方向 | Engineering ; Optics ; Physics |
| WOS类目 | Engineering, Electrical & Electronic ; Optics ; Physics, Applied |
| 语种 | 英语 |
| WOS记录号 | WOS:000229850300017 |
| 出版者 | IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC |
| URI标识 | http://www.irgrid.ac.cn/handle/1471x/2426316 |
| 专题 | 半导体研究所 |
| 通讯作者 | Liu, JW |
| 作者单位 | Chinese Acad Sci, Inst Semicond, State Key Lab Integrated Optoelect, Beijing 100083, Peoples R China |
| 推荐引用方式 GB/T 7714 | Liu, JW,Yu, JZ,Chen, SW,et al. Integrated folding 4x4 optical matrix switch with total internal reflection mirrors on soi by anisotropic chemical etching[J]. Ieee photonics technology letters,2005,17(6):1187-1189. |
| APA | Liu, JW,Yu, JZ,Chen, SW,&Li, ZY.(2005).Integrated folding 4x4 optical matrix switch with total internal reflection mirrors on soi by anisotropic chemical etching.Ieee photonics technology letters,17(6),1187-1189. |
| MLA | Liu, JW,et al."Integrated folding 4x4 optical matrix switch with total internal reflection mirrors on soi by anisotropic chemical etching".Ieee photonics technology letters 17.6(2005):1187-1189. |
入库方式： iSwitch采集
来源：半导体研究所
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