Nucleation of diamond by pure carbon ion bombardment - a transmission electron microscopy study
文献类型:期刊论文
作者 | Yao, Y; Liao, MY; Wang, ZG; Lifshitz, Y; Lee, ST |
刊名 | Applied physics letters
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出版日期 | 2005-08-08 |
卷号 | 87期号:6页码:3 |
ISSN号 | 0003-6951 |
DOI | 10.1063/1.2007869 |
通讯作者 | Lee, st() |
英文摘要 | A cross-sectional high-resolution transmission electron microscopy (hrtem) study of a film deposited by a 1 kev mass-selected carbon ion beam onto silicon held at 800 degrees c is presented. initially, a graphitic film with its basal planes perpendicular to the substrate is evolving. the precipitation of nanodiamond crystallites in upper layers is confirmed by hrtem, selected area electron diffraction, and electron energy loss spectroscopy. the nucleation of diamond on graphitic edges as predicted by lambrecht [w. r. l. lambrecht, c. h. lee, b. segall, j. c. angus, z. li, and m. sunkara, nature, 364 607 (1993)] is experimentally confirmed. the results are discussed in terms of our recent subplantation-based diamond nucleation model. (c) 2005 american institute of physics. |
WOS关键词 | BEAM DEPOSITION ; GRAPHITIC CARBON ; FILMS ; GROWTH |
WOS研究方向 | Physics |
WOS类目 | Physics, Applied |
语种 | 英语 |
WOS记录号 | WOS:000231016900054 |
出版者 | AMER INST PHYSICS |
URI标识 | http://www.irgrid.ac.cn/handle/1471x/2426367 |
专题 | 半导体研究所 |
通讯作者 | Lee, ST |
作者单位 | 1.City Univ Hong Kong, Ctr Super Diamond & Adv Films COSDAF, Hong Kong, Hong Kong, Peoples R China 2.City Univ Hong Kong, Dept Phys & Mat Sci, Hong Kong, Hong Kong, Peoples R China 3.Chinese Acad Sci, Inst Semicond, Key Lab Semicond Mat Sci, Beijing 100083, Peoples R China 4.Technion Israel Inst Technol, Dept Mat Engn, IL-32000 Haifa, Israel |
推荐引用方式 GB/T 7714 | Yao, Y,Liao, MY,Wang, ZG,et al. Nucleation of diamond by pure carbon ion bombardment - a transmission electron microscopy study[J]. Applied physics letters,2005,87(6):3. |
APA | Yao, Y,Liao, MY,Wang, ZG,Lifshitz, Y,&Lee, ST.(2005).Nucleation of diamond by pure carbon ion bombardment - a transmission electron microscopy study.Applied physics letters,87(6),3. |
MLA | Yao, Y,et al."Nucleation of diamond by pure carbon ion bombardment - a transmission electron microscopy study".Applied physics letters 87.6(2005):3. |
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来源:半导体研究所
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