Preparation and properties of gan micro-ribbons on ga-diffused si (111) substrates
文献类型:期刊论文
作者 | Xue, CS; Sun, ZC; Wei, QQ; Cao, WT; Zhuang, HZ |
刊名 | Rare metal materials and engineering |
出版日期 | 2005-07-01 |
卷号 | 34期号:7页码:1162-1165 |
ISSN号 | 1002-185X |
关键词 | Ga2o3 films Gan micro-ribbons Radio frequency (r.f.) magnetron sputtering |
通讯作者 | Xue, cs() |
英文摘要 | Hexagonal gan micro-ribbons were synthesized through nitriding ga2o3 films under flowing ammonia. ga2o3 films were deposited on the ga-diffused si (111) substrates by radio frequency (r.f.) magnetron sputtering. x-ray diffraction (xrd), scanning electron microscopy (sem), selected area electron diffraction (saed); x-ray photo electronic spectrometer (xps) and photoluminescence (pl) spectroscopy were used to characterize the structure, surface morphology, composition and optical property of the synthesized samples. sem images show that gan micro-ribbons with 100-300nm in diameter are randomly distributed on the uniform films. xrd, xps and saed analysis suggest the micro-ribbons are polycrystalline gan with hexagonal structure and preferentially grow in the [001] direction. the pl spectrum has a remarkable blue shift compared with the reported values of bulk gan, which might be ascribed to quantum confinement effects. |
WOS研究方向 | Materials Science ; Metallurgy & Metallurgical Engineering |
WOS类目 | Materials Science, Multidisciplinary ; Metallurgy & Metallurgical Engineering |
语种 | 英语 |
出版者 | NORTHWEST INST NONFERROUS METAL RESEARCH |
WOS记录号 | WOS:000231868200040 |
URI标识 | http://www.irgrid.ac.cn/handle/1471x/2426395 |
专题 | 半导体研究所 |
通讯作者 | Xue, CS |
作者单位 | Shandong Normal Univ, Inst Semicond, Jinan 250014, Peoples R China |
推荐引用方式 GB/T 7714 | Xue, CS,Sun, ZC,Wei, QQ,et al. Preparation and properties of gan micro-ribbons on ga-diffused si (111) substrates[J]. Rare metal materials and engineering,2005,34(7):1162-1165. |
APA | Xue, CS,Sun, ZC,Wei, QQ,Cao, WT,&Zhuang, HZ.(2005).Preparation and properties of gan micro-ribbons on ga-diffused si (111) substrates.Rare metal materials and engineering,34(7),1162-1165. |
MLA | Xue, CS,et al."Preparation and properties of gan micro-ribbons on ga-diffused si (111) substrates".Rare metal materials and engineering 34.7(2005):1162-1165. |
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来源:半导体研究所
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