中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Preparation and properties of gan micro-ribbons on ga-diffused si (111) substrates

文献类型:期刊论文

作者Xue, CS; Sun, ZC; Wei, QQ; Cao, WT; Zhuang, HZ
刊名Rare metal materials and engineering
出版日期2005-07-01
卷号34期号:7页码:1162-1165
ISSN号1002-185X
关键词Ga2o3 films Gan micro-ribbons Radio frequency (r.f.) magnetron sputtering
通讯作者Xue, cs()
英文摘要Hexagonal gan micro-ribbons were synthesized through nitriding ga2o3 films under flowing ammonia. ga2o3 films were deposited on the ga-diffused si (111) substrates by radio frequency (r.f.) magnetron sputtering. x-ray diffraction (xrd), scanning electron microscopy (sem), selected area electron diffraction (saed); x-ray photo electronic spectrometer (xps) and photoluminescence (pl) spectroscopy were used to characterize the structure, surface morphology, composition and optical property of the synthesized samples. sem images show that gan micro-ribbons with 100-300nm in diameter are randomly distributed on the uniform films. xrd, xps and saed analysis suggest the micro-ribbons are polycrystalline gan with hexagonal structure and preferentially grow in the [001] direction. the pl spectrum has a remarkable blue shift compared with the reported values of bulk gan, which might be ascribed to quantum confinement effects.
WOS研究方向Materials Science ; Metallurgy & Metallurgical Engineering
WOS类目Materials Science, Multidisciplinary ; Metallurgy & Metallurgical Engineering
语种英语
出版者NORTHWEST INST NONFERROUS METAL RESEARCH
WOS记录号WOS:000231868200040
URI标识http://www.irgrid.ac.cn/handle/1471x/2426395
专题半导体研究所
通讯作者Xue, CS
作者单位Shandong Normal Univ, Inst Semicond, Jinan 250014, Peoples R China
推荐引用方式
GB/T 7714
Xue, CS,Sun, ZC,Wei, QQ,et al. Preparation and properties of gan micro-ribbons on ga-diffused si (111) substrates[J]. Rare metal materials and engineering,2005,34(7):1162-1165.
APA Xue, CS,Sun, ZC,Wei, QQ,Cao, WT,&Zhuang, HZ.(2005).Preparation and properties of gan micro-ribbons on ga-diffused si (111) substrates.Rare metal materials and engineering,34(7),1162-1165.
MLA Xue, CS,et al."Preparation and properties of gan micro-ribbons on ga-diffused si (111) substrates".Rare metal materials and engineering 34.7(2005):1162-1165.

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来源:半导体研究所

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