Research progresses of soi optical waveguide devices and integrated optical switch matrix
文献类型：期刊论文
| 作者 | Yu, JZ; Chen, SW; Xia, JS; Wang, ZT; Fan, ZC; Li, YP; Liu, JW; Yang, D; Chen, YY |
| 刊名 | Science in china series f-information sciences
 |
| 出版日期 | 2005-04-01 |
| 卷号 | 48期号:2页码:234-246 |
| 关键词 | Soi (silicon-on-insulator) Optical waveguide Single mode condition Mmi (multi-mode interference) Voa (variable optical attenuator) Integrated optical switch matrix |
| ISSN号 | 1009-2757 |
| DOI | 10.1360/04yf0311 |
| 通讯作者 | Yu, jz(jzyu@red.semi.ac.cn) |
| 英文摘要 | Soi (silicon-on-insulator) is a new material with a lot of important performances such as large index difference, low transmission loss. fabrication processes for soi based optoelectronic devices are compatible with conventional ic processes. having the potential of oeic monolithic integration, soi based optoelectronic devices have shown many good characteristics and become more and more attractive recently. in this paper, the recent progresses of soi waveguide devices in our research group are presented. by highly effective numerical simulation, the single mode conditions for soi rib waveguides with rectangular and trapezoidal cross-section were accurately investigated. using both chemical anisotropic wet etching and plasma dry etching techniques, soi single mode rib waveguide, mmi coupler, voa (variable optical attenuator), 2x2 thermal-optical switch were successfully designed and fabricated. based on these, 4x4 and 8x8 soi optical waveguide integrated switch matrixes are demonstrated for the first time. |
| WOS关键词 | SINGLE-MODE CONDITION ; SILICON-ON-INSULATOR ; TRAPEZOIDAL CROSS-SECTION ; COUPLER |
| WOS研究方向 | Computer Science |
| WOS类目 | Computer Science, Information Systems |
| 语种 | 英语 |
| WOS记录号 | WOS:000229230300009 |
| 出版者 | SCIENCE CHINA PRESS |
| URI标识 | http://www.irgrid.ac.cn/handle/1471x/2426448 |
| 专题 | 半导体研究所 |
| 通讯作者 | Yu, JZ |
| 作者单位 | Chinese Acad Sci, Inst Semicond, State Key Lab Integrated Optoelect, Beijing 100083, Peoples R China |
| 推荐引用方式 GB/T 7714 | Yu, JZ,Chen, SW,Xia, JS,et al. Research progresses of soi optical waveguide devices and integrated optical switch matrix[J]. Science in china series f-information sciences,2005,48(2):234-246. |
| APA | Yu, JZ.,Chen, SW.,Xia, JS.,Wang, ZT.,Fan, ZC.,...&Chen, YY.(2005).Research progresses of soi optical waveguide devices and integrated optical switch matrix.Science in china series f-information sciences,48(2),234-246. |
| MLA | Yu, JZ,et al."Research progresses of soi optical waveguide devices and integrated optical switch matrix".Science in china series f-information sciences 48.2(2005):234-246. |
入库方式： iSwitch采集
来源：半导体研究所
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