Depth dependent elastic strain in zno epilayer: combined rutherford backscattering/channeling and x-ray diffraction
文献类型：期刊论文
| 作者 | Feng, ZX; Yao, SD; Hou, L; Jin, RQ |
| 刊名 | Nuclear instruments & methods in physics research section b-beam interactions with materials and atoms
 |
| 出版日期 | 2005-03-01 |
| 卷号 | 229期号:2页码:246-252 |
| ISSN号 | 0168-583X |
| 关键词 | Rutherford backscattering/channeling Elastic strain Tetragonal distortion Lattice mismatich |
| DOI | 10.1016/j.nimb.2004.11.020 |
| 通讯作者 | Feng, zx(fengz@physics.mcgill.ca) |
| 英文摘要 | A zno layer was grown by metalorganic chemical vapor deposition (mocvd) on a sapphire (0 0 0 1) substrate. the perpendicular and parallel elastic strain of the zno epilayer, e(perpendicular to) = 0.19%, e(parallel to) = -0.29%, respectively, were derived by using the combination of rutherford backscattering (rbs)/channeling and x-ray diffraction (xrd). the ratio vertical bar e(parallel to)/ e(perpendicular to)vertical bar = 1.5 indicates that zno layer is much stiffer in the a-axis direction than in the c-axis direction. by using rbs/c, the depth dependent elastic strain was deduced. the strain is higher at the depth close to the interface and decreases towards the surface. the negative tetragonal distortion was explained by considering the lattice mismatch and thermal mismatch in zno thin film. (c) 2004 elsevier b.v. all rights reserved. |
| WOS关键词 | SAPPHIRE ; HETEROEPITAXY ; DEVICES ; GROWTH ; FILMS |
| WOS研究方向 | Instruments & Instrumentation ; Nuclear Science & Technology ; Physics |
| WOS类目 | Instruments & Instrumentation ; Nuclear Science & Technology ; Physics, Atomic, Molecular & Chemical ; Physics, Nuclear |
| 语种 | 英语 |
| 出版者 | ELSEVIER SCIENCE BV |
| WOS记录号 | WOS:000227669600008 |
| URI标识 | http://www.irgrid.ac.cn/handle/1471x/2426513 |
| 专题 | 半导体研究所 |
| 通讯作者 | Feng, ZX |
| 作者单位 | 1.McGill Univ, Dept Phys, Montreal, PQ H3A 2T8, Canada 2.Peking Univ, Sch Phys, Dept Tech Phys, Beijing 100871, Peoples R China 3.Chinese Acad Sci, Inst Semicond, Beijing 100083, Peoples R China |
| 推荐引用方式 GB/T 7714 | Feng, ZX,Yao, SD,Hou, L,et al. Depth dependent elastic strain in zno epilayer: combined rutherford backscattering/channeling and x-ray diffraction[J]. Nuclear instruments & methods in physics research section b-beam interactions with materials and atoms,2005,229(2):246-252. |
| APA | Feng, ZX,Yao, SD,Hou, L,&Jin, RQ.(2005).Depth dependent elastic strain in zno epilayer: combined rutherford backscattering/channeling and x-ray diffraction.Nuclear instruments & methods in physics research section b-beam interactions with materials and atoms,229(2),246-252. |
| MLA | Feng, ZX,et al."Depth dependent elastic strain in zno epilayer: combined rutherford backscattering/channeling and x-ray diffraction".Nuclear instruments & methods in physics research section b-beam interactions with materials and atoms 229.2(2005):246-252. |
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来源：半导体研究所
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