Optical band gap of zinc nitride films prepared on quartz substrates from a zinc nitride target by reactive rf magnetron sputtering
文献类型：期刊论文
| 作者 | Zong, Fujian; Ma, Honglei; Du, Wei; Ma, Jin; Zhang, Xijian; Xiao, Hongdi; Ji, Feng; Xue, Chengshan |
| 刊名 | Applied surface science
 |
| 出版日期 | 2006-09-15 |
| 卷号 | 252期号:22页码:7983-7986 |
| 关键词 | Optical band gap Zinc nitride films Zinc nitride target Reactive rf magnetron sputtering Absorption coefficient |
| ISSN号 | 0169-4332 |
| DOI | 10.1016/j.apsusc.2005.10.006 |
| 通讯作者 | Zong, fujian(fjzong@sdu.edu.cn) |
| 英文摘要 | Polycrystalline zinc nitride films have been synthesized onto quartz substrates from the zinc nitride target and the nitrogen working gas by reactive rf magnetron sputtering at room temperature. x-ray diffraction study indicates that polycrystalline zinc nitride films are of cubic structure with the lattice constant a = 0.979(1) nm and have preferred orientations with (3 2 1) and (4 4 2). its absorption coefficients as well as the film thickness are calculated from the transmission spectra, which are measured with a double beam spectrophotometer. the optical band gap has been determined from the photon energy dependence of absorption coefficient, an indirect transition optical band gap of 2.12(3) ev has been obtained. (c) 2005 elsevier b.v. all rights reserved. |
| WOS关键词 | THIN-FILMS ; ZN3N2 POWDER |
| WOS研究方向 | Chemistry ; Materials Science ; Physics |
| WOS类目 | Chemistry, Physical ; Materials Science, Coatings & Films ; Physics, Applied ; Physics, Condensed Matter |
| 语种 | 英语 |
| WOS记录号 | WOS:000240792100040 |
| 出版者 | ELSEVIER SCIENCE BV |
| URI标识 | http://www.irgrid.ac.cn/handle/1471x/2426577 |
| 专题 | 半导体研究所 |
| 通讯作者 | Zong, Fujian |
| 作者单位 | 1.Shandong Univ, Sch Phys & Microelect, Jinan 250100, Peoples R China 2.Shandong Normal Univ, Inst Semicond, Jinan 250014, Peoples R China |
| 推荐引用方式 GB/T 7714 | Zong, Fujian,Ma, Honglei,Du, Wei,et al. Optical band gap of zinc nitride films prepared on quartz substrates from a zinc nitride target by reactive rf magnetron sputtering[J]. Applied surface science,2006,252(22):7983-7986. |
| APA | Zong, Fujian.,Ma, Honglei.,Du, Wei.,Ma, Jin.,Zhang, Xijian.,...&Xue, Chengshan.(2006).Optical band gap of zinc nitride films prepared on quartz substrates from a zinc nitride target by reactive rf magnetron sputtering.Applied surface science,252(22),7983-7986. |
| MLA | Zong, Fujian,et al."Optical band gap of zinc nitride films prepared on quartz substrates from a zinc nitride target by reactive rf magnetron sputtering".Applied surface science 252.22(2006):7983-7986. |
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来源：半导体研究所
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