Formation of beta-sic nanowires by annealing sic films in hydrogen atmosphere
文献类型：期刊论文
| 作者 | Yang, Li; Zhang, Xing; Huang, Ru; Zhang, Guoyan; Xue, Chengshan |
| 刊名 | Physica e-low-dimensional systems & nanostructures
 |
| 出版日期 | 2006-08-01 |
| 卷号 | 35期号:1页码:146-150 |
| 关键词 | Thin films Beta-sic Nanowires Annealing Radio frequency magnetron sputtering |
| ISSN号 | 1386-9477 |
| DOI | 10.1016/j.physe.2006.07.037 |
| 通讯作者 | Yang, li(yangl@ime.pku.edu.cn) |
| 英文摘要 | The single crystalline beta-sic nanowires were grown through annealing polycrystalline sic thin films in h-2 at 1150 degrees c. the sic thin films were deposited on si (i 11) substrate by radio frequency magnetron sputtering at room temperature. x-ray diffraction (xrd), scanning electron microscopy (sem), x-ray photoelectron spectroscopy (xps) and transmission electron microscopy (tem) were employed to determine the structure, composition and surface morphology of the synthesized one-dimensional sic nanostructures. sem results show the diameters of sic nanowires vary between 20 and 60 nm with length up to 50 mu m. xrd and tem confirm the grown sic nanowires are single crystalline beta-sic. (c) 2006 published by elsevier b.v. |
| WOS关键词 | CHEMICAL-VAPOR-DEPOSITION ; SILICON-CARBIDE ; GROWTH ; NANORODS ; TEMPERATURE ; NANOTUBES ; WHISKERS ; NITRIDE ; CARBON |
| WOS研究方向 | Science & Technology - Other Topics ; Physics |
| WOS类目 | Nanoscience & Nanotechnology ; Physics, Condensed Matter |
| 语种 | 英语 |
| WOS记录号 | WOS:000241425700026 |
| 出版者 | ELSEVIER SCIENCE BV |
| URI标识 | http://www.irgrid.ac.cn/handle/1471x/2426583 |
| 专题 | 半导体研究所 |
| 通讯作者 | Yang, Li |
| 作者单位 | 1.Peking Univ, Inst Microelect, Beijing 100871, Peoples R China 2.Shandong Normal Univ, Inst Semicond, Jinan 250014, Peoples R China |
| 推荐引用方式 GB/T 7714 | Yang, Li,Zhang, Xing,Huang, Ru,et al. Formation of beta-sic nanowires by annealing sic films in hydrogen atmosphere[J]. Physica e-low-dimensional systems & nanostructures,2006,35(1):146-150. |
| APA | Yang, Li,Zhang, Xing,Huang, Ru,Zhang, Guoyan,&Xue, Chengshan.(2006).Formation of beta-sic nanowires by annealing sic films in hydrogen atmosphere.Physica e-low-dimensional systems & nanostructures,35(1),146-150. |
| MLA | Yang, Li,et al."Formation of beta-sic nanowires by annealing sic films in hydrogen atmosphere".Physica e-low-dimensional systems & nanostructures 35.1(2006):146-150. |
入库方式： iSwitch采集
来源：半导体研究所
浏览0
下载0
收藏0
其他版本
除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。