High-precision determination of lattice constants and structural characterization of inn thin films
文献类型：期刊论文
| 作者 | Wu, MF; Zhou, SQ; Vantomme, A; Huang, Y; Wang, H; Yang, H |
| 刊名 | Journal of vacuum science & technology a
 |
| 出版日期 | 2006-03-01 |
| 卷号 | 24期号:2页码:275-279 |
| ISSN号 | 0734-2101 |
| DOI | 10.1116/1.2167970 |
| 通讯作者 | Wu, mf(mfwu@publica.bj.cninfo.net) |
| 英文摘要 | X-ray diffraction and rutherford backscattering/channeling were used to characterize the crystalline quality of an inn layer grown on al2o3(0001) using metal-organic chemical-vapor deposition. a full width at half maximum of 0.27 degrees from an inn(0002) omega scan and a minimum yield of 23% from channeling measurements show that this 480-nm-thick inn layer grown at low temperature (450 degrees c) has a relatively good crystalline quality. high-resolution x-ray diffraction indicates that the inn layer contains a small fraction of cubic inn, besides the predominant hexagonal phase. from this inn sample, the lattice constants a=0.353 76 nm and c=0.570 64 nm for the hexagonal inn and a=0.4986 nm for the cubic inn were determined independently. 2 theta/omega-chi mapping and a pole figure measurement revealed that the crystallographic relationship among the cubic inn, the hexagonal inn, and the substrate is: inn[111]parallel to inn[0001]parallel to al2o3[0001] and inn{110}parallel to inn{1120}parallel to al2o3{1010}, and that the cubic inn is twinned. photoluminescence measurements indicate that the band-gap energy of this sample is approximately 0.82 ev. (c) 2006 american vacuum society. |
| WOS关键词 | X-RAY-DIFFRACTION ; BAND-GAP ; EPITAXIAL LAYERS ; INDIUM NITRIDE ; HEXAGONAL INN ; CUBIC INN ; GROWTH ; PARAMETERS ; INGAN ; PHASE |
| WOS研究方向 | Materials Science ; Physics |
| WOS类目 | Materials Science, Coatings & Films ; Physics, Applied |
| 语种 | 英语 |
| 出版者 | A V S AMER INST PHYSICS |
| WOS记录号 | WOS:000236234600018 |
| URI标识 | http://www.irgrid.ac.cn/handle/1471x/2426616 |
| 专题 | 半导体研究所 |
| 通讯作者 | Wu, MF |
| 作者单位 | 1.Peking Univ, Dept Tech Phys, Sch Phys, Beijing 100871, Peoples R China 2.Katholieke Univ Leuven, Inst Kern Stralingsfys, B-3001 Heverlee, Belgium 3.Chinese Acad Sci, Inst Semicond, State Key Lab Integrated Optoelect, Beijing 100083, Peoples R China |
| 推荐引用方式 GB/T 7714 | Wu, MF,Zhou, SQ,Vantomme, A,et al. High-precision determination of lattice constants and structural characterization of inn thin films[J]. Journal of vacuum science & technology a,2006,24(2):275-279. |
| APA | Wu, MF,Zhou, SQ,Vantomme, A,Huang, Y,Wang, H,&Yang, H.(2006).High-precision determination of lattice constants and structural characterization of inn thin films.Journal of vacuum science & technology a,24(2),275-279. |
| MLA | Wu, MF,et al."High-precision determination of lattice constants and structural characterization of inn thin films".Journal of vacuum science & technology a 24.2(2006):275-279. |
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来源：半导体研究所
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