Chemical composition and elastic strain in alingan quaternary films
文献类型：期刊论文
| 作者 | Zhou, Shengqiang; Wu, M. F.; Yao, S. D.; Liu, J. P.; Yang, H. |
| 刊名 | Thin solid films
 |
| 出版日期 | 2006-12-05 |
| 卷号 | 515期号:4页码:1429-1432 |
| 关键词 | Rutherford backscattering spectroscopy Stress X-ray diffraction Quaternary compounds Iii-v semiconductors |
| ISSN号 | 0040-6090 |
| DOI | 10.1016/j.tsf.2006.04.005 |
| 通讯作者 | Zhou, shengqiang(s.zhou@fz-rossendorf.de) |
| 英文摘要 | High-quality alingan quaternary layers were grown on c-al2o3 using a thick gan template. a full width at half maximum of 0.075 degrees from alingan(0004) rocking curve and a minimum yield of 5.6% from rutherford backscattering/channelling spectrometry (rbs) prove the alingan layer of a comparable crystalline quality with gan layers. the chemical compositions (both of al and in contents) of alingan layers are directly obtained from rbs and elastic recoil detection analysis. the lattice parameters both in perpendicular and parallel directions are deduced from x-ray diffraction. the alingan layer is found to process a compressive strain in parallel direction and a tensile strain in perpendicular direction. (c) 2006 elsevier b.v. all rights reserved. |
| WOS关键词 | X-RAY-DIFFRACTION ; GROUP-III NITRIDES ; EPILAYERS ; LAYERS |
| WOS研究方向 | Materials Science ; Physics |
| WOS类目 | Materials Science, Multidisciplinary ; Materials Science, Coatings & Films ; Physics, Applied ; Physics, Condensed Matter |
| 语种 | 英语 |
| WOS记录号 | WOS:000242931900030 |
| 出版者 | ELSEVIER SCIENCE SA |
| URI标识 | http://www.irgrid.ac.cn/handle/1471x/2426629 |
| 专题 | 半导体研究所 |
| 通讯作者 | Zhou, Shengqiang |
| 作者单位 | 1.Peking Univ, Sch Phys, Beijing 100871, Peoples R China 2.Chinese Acad Sci, Inst Semicond, State Key Lab Integrated Optoelect, Beijing 100083, Peoples R China |
| 推荐引用方式 GB/T 7714 | Zhou, Shengqiang,Wu, M. F.,Yao, S. D.,et al. Chemical composition and elastic strain in alingan quaternary films[J]. Thin solid films,2006,515(4):1429-1432. |
| APA | Zhou, Shengqiang,Wu, M. F.,Yao, S. D.,Liu, J. P.,&Yang, H..(2006).Chemical composition and elastic strain in alingan quaternary films.Thin solid films,515(4),1429-1432. |
| MLA | Zhou, Shengqiang,et al."Chemical composition and elastic strain in alingan quaternary films".Thin solid films 515.4(2006):1429-1432. |
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来源：半导体研究所
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