中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Fabrication of ge nano-dot heterojunction phototransistors for improved light detection at 1.55 mu m

文献类型:期刊论文

作者Shi, WH; Mao, RW; Zhao, L; Luo, LP; Wang, QM
刊名Chinese physics letters
出版日期2006-03-01
卷号23期号:3页码:735-737
ISSN号0256-307X
通讯作者Shi, wh(whshi@red.semi.ac.cn)
英文摘要Heterojunction phototransistors (hpts) with several ge/si nano-dot layers as the absorption region are fabricated to obtain improved light detectivity at 1.55 mu m. the hpt detectors are of n-p-n type with ten layers of ge(8ml)/si(45nm) incorporated in the base-collector junction and are grown by an ultrahigh-vacuum chemical-vapor deposition system. the detectors are operated with normal incidence. because of the good quality of the grown material and fabrication process, the dark current is only 0.71pa/mu m(2) under 5 v bias and the break-down voltage is over 20 v. compared to the positive-intrinsic-negative (pin) reference detector with the same absorption layer, the responsivity is improved over 17 times for normal incidence at 1.55 mu m.
WOS关键词SILICON ; HETEROSTRUCTURES
WOS研究方向Physics
WOS类目Physics, Multidisciplinary
语种英语
WOS记录号WOS:000235928800058
出版者CHINESE PHYSICAL SOC
URI标识http://www.irgrid.ac.cn/handle/1471x/2426635
专题半导体研究所
通讯作者Shi, WH
作者单位Chinese Acad Sci, Inst Semicond, State Key Lab Integrated Optoelect, Beijing 100083, Peoples R China
推荐引用方式
GB/T 7714
Shi, WH,Mao, RW,Zhao, L,et al. Fabrication of ge nano-dot heterojunction phototransistors for improved light detection at 1.55 mu m[J]. Chinese physics letters,2006,23(3):735-737.
APA Shi, WH,Mao, RW,Zhao, L,Luo, LP,&Wang, QM.(2006).Fabrication of ge nano-dot heterojunction phototransistors for improved light detection at 1.55 mu m.Chinese physics letters,23(3),735-737.
MLA Shi, WH,et al."Fabrication of ge nano-dot heterojunction phototransistors for improved light detection at 1.55 mu m".Chinese physics letters 23.3(2006):735-737.

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来源:半导体研究所

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