Fabrication and properties of sb-doped zno thin films grown by radio frequency (rf) magnetron sputtering
文献类型：期刊论文
| 作者 | Wang, P; Chen, NF; Yin, ZG; Yang, F; Peng, CT |
| 刊名 | Journal of crystal growth
 |
| 出版日期 | 2006-04-15 |
| 卷号 | 290期号:1页码:56-60 |
| 关键词 | Crystal structure Thermal annealing X-ray diffraction Rf magnetron sputtering Zinc oxide Semiconducting ii-vi materials |
| ISSN号 | 0022-0248 |
| DOI | 10.1016/j.jcrysgro.2006.01.022 |
| 通讯作者 | Wang, p(pwang@mail.semi.ac.cn) |
| 英文摘要 | Sb-doped and undoped zno thin films were deposited on si (100) substrates by radio frequency (rf) magnetron sputtering. x-ray diffraction (xrd) and scanning electron microscopy (sem) analyses revealed that all the films had polycrystalline wurtzite structure and c-axis preferred orientation. room temperature hall measurements showed that the as-grown films were n-type and conducting (rho similar to 1-10 omega cm). annealing in a nitrogen ambient at 400 degrees c for 1 h made both samples highly resistive (rho > 10(3) omega cm). increasing the annealing temperature up to 800 c, the resistivity of the ttndoped zno film decreased gradually, but it increased for the sb-doped zno film. in the end, the sb-doped zno film annealed at 800 c became semi-insulating with a resistivity of 10(4)omega cm. in addition, the effects of annealing treatment and sb-doping on the structural and electrical properties are discussed. (c) 2006 elsevier b.v. all rights reserved. |
| WOS关键词 | P-TYPE ZNO ; SPRAY-PYROLYSIS ; ZINC-OXIDE |
| WOS研究方向 | Crystallography ; Materials Science ; Physics |
| WOS类目 | Crystallography ; Materials Science, Multidisciplinary ; Physics, Applied |
| 语种 | 英语 |
| WOS记录号 | WOS:000236656600010 |
| 出版者 | ELSEVIER SCIENCE BV |
| URI标识 | http://www.irgrid.ac.cn/handle/1471x/2426683 |
| 专题 | 半导体研究所 |
| 通讯作者 | Wang, P |
| 作者单位 | 1.Chinese Acad Sci, Inst Semicond, Key Lab Semicond Mat Sci, Beijing 100083, Peoples R China 2.Chinese Acad Sci, Inst Mech, Natl Lab Micrograv, Beijing 100080, Peoples R China |
| 推荐引用方式 GB/T 7714 | Wang, P,Chen, NF,Yin, ZG,et al. Fabrication and properties of sb-doped zno thin films grown by radio frequency (rf) magnetron sputtering[J]. Journal of crystal growth,2006,290(1):56-60. |
| APA | Wang, P,Chen, NF,Yin, ZG,Yang, F,&Peng, CT.(2006).Fabrication and properties of sb-doped zno thin films grown by radio frequency (rf) magnetron sputtering.Journal of crystal growth,290(1),56-60. |
| MLA | Wang, P,et al."Fabrication and properties of sb-doped zno thin films grown by radio frequency (rf) magnetron sputtering".Journal of crystal growth 290.1(2006):56-60. |
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来源：半导体研究所
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