Dependence of intrinsic defects in zno films on oxygen fraction studied by positron annihilation
文献类型：期刊论文
| 作者 | Peng, CX; Weng, HM; Yang, XJ; Ye, BJ; Cheng, B; Zhou, XY; Han, RD |
| 刊名 | Chinese physics letters
 |
| 出版日期 | 2006-02-01 |
| 卷号 | 23期号:2页码:489-492 |
| ISSN号 | 0256-307X |
| 通讯作者 | Peng, cx(pengcx@mail.ustc.edu.cn) |
| 英文摘要 | Defects in zno films grown by radio-frequency reactive magnetron sputtering under variable ratios between oxygen and argon gas have been investigated by using the monoenergetic positron beam technique. the dominate intrinsic defects in these zno samples are o vacancies (v-o) and zn interstitials (zn-i) when the oxygen fraction in the o-2/ar feed gas does not exceed 70% in the processing chamber. on the other hand, zinc vacancies are preponderant in the zno elms fabricated in richer oxygen environment. the concentration of zinc vacancies increases with the increasing (2) fraction. for the oxygen fraction 85%, the number of zinc vacancies that could trap positrons will be smaller. it is speculated that some unknown defects could shield zinc vacancies. the concentration of zinc vacancies in the zno films varies with the oxygen fraction in the growth chamber, which is in agreement with the results of photoluminescence spectra. |
| WOS关键词 | P-TYPE ZNO ; THIN-FILMS ; ROOM-TEMPERATURE ; PHOTOLUMINESCENCE ; DEPOSITION ; SUBSTRATE ; VACANCIES ; LAYER ; BEAM ; GAN |
| WOS研究方向 | Physics |
| WOS类目 | Physics, Multidisciplinary |
| 语种 | 英语 |
| WOS记录号 | WOS:000235255200060 |
| 出版者 | CHINESE PHYSICAL SOC |
| URI标识 | http://www.irgrid.ac.cn/handle/1471x/2426798 |
| 专题 | 半导体研究所 |
| 通讯作者 | Peng, CX |
| 作者单位 | 1.Univ Sci & Technol China, Dept Modern Phys, Hefei 230026, Peoples R China 2.Chinese Acad Sci, Inst Semicond, Key Lab Nanooptoelect, Beijing 100083, Peoples R China |
| 推荐引用方式 GB/T 7714 | Peng, CX,Weng, HM,Yang, XJ,et al. Dependence of intrinsic defects in zno films on oxygen fraction studied by positron annihilation[J]. Chinese physics letters,2006,23(2):489-492. |
| APA | Peng, CX.,Weng, HM.,Yang, XJ.,Ye, BJ.,Cheng, B.,...&Han, RD.(2006).Dependence of intrinsic defects in zno films on oxygen fraction studied by positron annihilation.Chinese physics letters,23(2),489-492. |
| MLA | Peng, CX,et al."Dependence of intrinsic defects in zno films on oxygen fraction studied by positron annihilation".Chinese physics letters 23.2(2006):489-492. |
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来源：半导体研究所
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