Evolution of mosaic structure in inn grown by metalorganic chemical vapor deposition
文献类型：期刊论文
| 作者 | Huang, Y.; Wang, H.; Sun, Q.; Chen, J.; Li, D. Y.; Zhang, J. C.; Wang, J. F.; Wang, Y. T.; Yang, H. |
| 刊名 | Journal of crystal growth
 |
| 出版日期 | 2006-08-01 |
| 卷号 | 293期号:2页码:269-272 |
| ISSN号 | 0022-0248 |
| 关键词 | Growth mode X-ray diffraction Metalorganic chemical vapor deposition Indium nitride |
| DOI | 10.1016/j.jcrysgro.2006.05.073 |
| 通讯作者 | Wang, h.(wangh@red.semi.ac.cn) |
| 英文摘要 | Mosaic structure in inn layers grown by metalorganic chemical vapor deposition at various temperatures has been investigated by x-ray diffraction (xrd). with a combination of williamson-hall measurement and fitting of twist angles, it was found that variation of growth temperature from 450 to 550 degrees c leads to the variation of the lateral coherence length, vertical coherence length, tilt and twist of mosaic blocks in inn films in a, respectively, monotonic way. in particular, mosaic tilt increases whereas mosaic twist decreases with elevating temperature. atomic force microscopy shows the morphological difference of the inn nucleation layers grown at 450 and 550 degrees c. different coalescence thickness and temperature-dependent in-plane rotation of inn nuclei are considered to account for the xrd results. (c) 2006 elsevier b.v. all rights reserved. |
| WOS关键词 | X-RAY-DIFFRACTION ; THREADING DISLOCATIONS ; ELECTRON-TRANSPORT ; BUFFER LAYER ; THIN-FILMS ; GAN FILMS ; SAPPHIRE ; ALN |
| WOS研究方向 | Crystallography ; Materials Science ; Physics |
| WOS类目 | Crystallography ; Materials Science, Multidisciplinary ; Physics, Applied |
| 语种 | 英语 |
| 出版者 | ELSEVIER SCIENCE BV |
| WOS记录号 | WOS:000239882600008 |
| URI标识 | http://www.irgrid.ac.cn/handle/1471x/2426811 |
| 专题 | 半导体研究所 |
| 通讯作者 | Wang, H. |
| 作者单位 | Chinese Acad Sci, Inst Semicond, State Key Lab Integrated Optoelect, Beijing 100083, Peoples R China |
| 推荐引用方式 GB/T 7714 | Huang, Y.,Wang, H.,Sun, Q.,et al. Evolution of mosaic structure in inn grown by metalorganic chemical vapor deposition[J]. Journal of crystal growth,2006,293(2):269-272. |
| APA | Huang, Y..,Wang, H..,Sun, Q..,Chen, J..,Li, D. Y..,...&Yang, H..(2006).Evolution of mosaic structure in inn grown by metalorganic chemical vapor deposition.Journal of crystal growth,293(2),269-272. |
| MLA | Huang, Y.,et al."Evolution of mosaic structure in inn grown by metalorganic chemical vapor deposition".Journal of crystal growth 293.2(2006):269-272. |
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来源：半导体研究所
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