Optical and micro-structural properties of zno thin films grown on silicon substrate by pulsed laser deposition
文献类型：期刊论文
| 作者 | He, JT; Zhuang, HZ; Xue, CS; Tian, DS; Wu, YX; Xue, SB; Hu, HJ |
| 刊名 | Journal of rare earths
 |
| 出版日期 | 2006-03-01 |
| 卷号 | 24页码:26-28 |
| 关键词 | Pld Zno Substrate temperature Oxygen pressure |
| ISSN号 | 1002-0721 |
| 通讯作者 | Zhuang, hz() |
| 英文摘要 | Zno thin films were deposited on n-si (111) at various substrate temperatures and oxygen pressures by pulsed laser deposition (pld) using a nd:yag laser with the wavelength of 1064 nm. x-ray diffraction (xrd), photoluminescence (pl), scanning electron microscopy (sem) and transmission electron microscopy (tem) were used to analyze the microstructure, optical property and morphology of the zno thin films. a comparatively optimal crystallized zno thin film was obtained at the substrate temperature of 600 degrees c in oxygen pressure of 50 mtorr. the intensity of the luminescence strongly depends on the stoichiometry of the film as well as the crystalline quality. |
| WOS关键词 | OXIDE-FILMS ; PHOTOLUMINESCENCE |
| WOS研究方向 | Chemistry |
| WOS类目 | Chemistry, Applied |
| 语种 | 英语 |
| WOS记录号 | WOS:000237331400009 |
| 出版者 | METALLURGICAL INDUSTRY PRESS |
| URI标识 | http://www.irgrid.ac.cn/handle/1471x/2426818 |
| 专题 | 半导体研究所 |
| 通讯作者 | Zhuang, HZ |
| 作者单位 | Shandong Normal Univ, Coll Phys & Elect, Inst Semicond, Jinan 250014, Peoples R China |
| 推荐引用方式 GB/T 7714 | He, JT,Zhuang, HZ,Xue, CS,et al. Optical and micro-structural properties of zno thin films grown on silicon substrate by pulsed laser deposition[J]. Journal of rare earths,2006,24:26-28. |
| APA | He, JT.,Zhuang, HZ.,Xue, CS.,Tian, DS.,Wu, YX.,...&Hu, HJ.(2006).Optical and micro-structural properties of zno thin films grown on silicon substrate by pulsed laser deposition.Journal of rare earths,24,26-28. |
| MLA | He, JT,et al."Optical and micro-structural properties of zno thin films grown on silicon substrate by pulsed laser deposition".Journal of rare earths 24(2006):26-28. |
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来源：半导体研究所
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